Method of fabricating organic thin film transistor using self assembled monolayer-forming compound containing dichlorophosphoryl group
First Claim
1. A method comprising:
- treating a surface of metal oxide source/drain electrodes or a surface of the metal oxide source/drain electrodes and a gate insulating layer with a self assembled monolayer-forming compound containing a dichlorophosphoryl group.
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Abstract
Disclosed is a method of fabricating an organic thin film transistor including a substrate, a gate electrode, a gate insulating layer, metal oxide source/drain electrodes, and an organic semiconductor layer, in which the surface of the metal oxide source/drain electrodes or of the metal oxide source/drain electrodes and gate insulating layer is treated with a self assembled monolayer-forming compound containing a dichlorophosphoryl group. According to the method of example embodiments, the work function of the metal oxide of the source/drain electrodes may be increased to be higher than that with no SAM-forming electrode, thus making it possible to fabricate an improved organic thin film transistor having increased charge mobility.
34 Citations
21 Claims
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1. A method comprising:
treating a surface of metal oxide source/drain electrodes or a surface of the metal oxide source/drain electrodes and a gate insulating layer with a self assembled monolayer-forming compound containing a dichlorophosphoryl group. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A self assembled monolayer-forming compound comprising:
a dichlorophosphoryl group is represented by Formula 1 below; - View Dependent Claims (19, 20, 21)
Specification