Method and system for centrally-controlled semiconductor wafer correlation
First Claim
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1. A system for wafer correlation, wherein a correlation wafer is tested and its testing results are compared to its previously-determined reference data, the system comprising:
- a database operable to store testing instructions for testing the correlation wafer and correlation criteria for comparing the testing results with the previously-determined reference data;
an instruction-server module operable to identify, at the database, the testing instructions and the correlation criteria and to transmit the testing instructions and correlation criteria;
a testing-control module operable to receive the testing instructions and correlation criteria from the instruction-server module and to output electrical signals according to thetesting instructions; and
a prober operable to test the correlation wafer according to the electrical signals;
wherein the testing-control module is operable to apply the correlation criteria and to transmit correlation data to the instruction-server module, wherein the correlation data comprise a count of matching and non-matching dice, andwherein the instruction-server module is further operable to apply a statistical model to the correlation data to generate new testing instructions, the new testing instructions stored in the database.
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Abstract
A centrally-controlled correlation system for testing a correlation wafer and comparing the testing results with the wafer'"'"'s reference data that has been determined previously. The testing instructions and the correlation criteria are stored and transmitted from a central database. Such centrally-controlled correlation system improves the reliability of the correlation results and reduces the time to correlate a correlation wafer.
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Citations
20 Claims
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1. A system for wafer correlation, wherein a correlation wafer is tested and its testing results are compared to its previously-determined reference data, the system comprising:
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a database operable to store testing instructions for testing the correlation wafer and correlation criteria for comparing the testing results with the previously-determined reference data; an instruction-server module operable to identify, at the database, the testing instructions and the correlation criteria and to transmit the testing instructions and correlation criteria; a testing-control module operable to receive the testing instructions and correlation criteria from the instruction-server module and to output electrical signals according to the testing instructions; and a prober operable to test the correlation wafer according to the electrical signals; wherein the testing-control module is operable to apply the correlation criteria and to transmit correlation data to the instruction-server module, wherein the correlation data comprise a count of matching and non-matching dice, and wherein the instruction-server module is further operable to apply a statistical model to the correlation data to generate new testing instructions, the new testing instructions stored in the database. - View Dependent Claims (4, 5, 6)
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2. (canceled)
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3. (canceled)
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7. A method for wafer correlation, wherein a correlation wafer is tested and its testing results are compared to its previously-determined reference data, the method comprising:
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identifying at a database, testing instructions for testing the correlation wafer and correlation criteria for comparing the testing results with the previously-determined reference data; transmitting from an instruction-server module to a testing-control module, the testing instructions; transmitting the correlation criteria from the instruction-server module to the testing-control module, wherein the correlation criteria is operable to be applied by the testing-control module; receiving, in the instruction-server module, correlation data from the testing-control module, wherein the correlation data comprises a count of matching and non-matching dice; and applying, in the instruction-server module, a statistical model to the correlation data to generate new testing instructions for testing the correlation wafer. - View Dependent Claims (10, 11, 12, 13)
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8. (canceled)
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9. (canceled)
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14. An instruction system for wafer correlation, wherein a correlation wafer is tested and its testing results are compared to its previously-determined reference data, the system comprising:
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a database operable to store the testing instructions for testing the correlation wafer and correlation criteria for comparing the testing results with the previously-determined reference data; and an instruction-server module operable to identify, at the database, the testing instructions and correlation criteria, and to transmit the testing instructions and the correlation criteria to a testing-control module, wherein the instruction-server module is further operable to receive correlation data and apply a statistical model to the correlation data to generate new testing instructions, and the correlation data comprises a count of matching and non-matching dice. - View Dependent Claims (15, 18, 19, 20)
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16. (canceled)
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17. (canceled)
Specification