DEVICE FOR CONTROLLING THE FREQUENCY OF RESONANCE OF AN OSCILLATING MICRO-ELECTROMECHANICAL SYSTEM
First Claim
Patent Images
1. A device, comprising:
- a microstructure including a first body and a second body, said second body being capacitively coupled to said first body and elastically oscillatable with respect thereto at a calibratable frequency of resonance, wherein a relative displacement between said second body and said first body is detectable;
an amplifier coupled to said microstructure for detecting said relative displacement; and
DC decoupling elements arranged between said microstructure and said amplifier.
1 Assignment
0 Petitions
Accused Products
Abstract
A device for controlling the frequency of resonance of an oscillating micro-electromechanical system includes: a microstructure, having a first body and a second body, which is capacitively coupled to the first body and elastically oscillatable with respect thereto at a calibratable frequency of resonance, a relative displacement between the second body and the first body being detectable from outside; and an amplifier coupled to the microstructure for detecting the relative displacement. DC decoupling elements are arranged between the amplifier and the microstructure.
18 Citations
25 Claims
-
1. A device, comprising:
-
a microstructure including a first body and a second body, said second body being capacitively coupled to said first body and elastically oscillatable with respect thereto at a calibratable frequency of resonance, wherein a relative displacement between said second body and said first body is detectable;
an amplifier coupled to said microstructure for detecting said relative displacement; and
DC decoupling elements arranged between said microstructure and said amplifier. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
-
-
14. An oscillating micro-electromechanical system comprising:
-
a microstructure including a first body and a second body, said second body capacitively coupled to said first body and elastically oscillatable with respect thereto at a calibratable frequency of resonance, wherein a relative displacement between said second body and said first body is detectable;
an amplifier coupled to said microstructure for detecting said relative displacement; and
means for controlling the frequency of resonance. - View Dependent Claims (15, 16, 17)
-
-
18. A method for controlling the frequency of resonance of a micro-electromechanical system comprising the steps of:
-
setting in oscillation a microstructure including a first body and a second body, said second body capacitively coupled to said first body and elastically oscillatable with respect thereto at a calibratable frequency of resonance;
generating a signal based on a relative displacement between said second body and said first body;
amplifying said signal using an amplifier; and
DC decoupling said amplifier from said microstructure. - View Dependent Claims (19, 20)
-
-
21. A MEMS system having a controllable resonance frequency, comprising:
-
a microstructure for generating a signal at a resonance frequency, the microstructure including a stator having a plurality of fixed electrodes, and a moveable body oscillatably coupled to the stator via mechanical elements and having a plurality of movable electrodes capacitively coupled to the plurality of fixed electrodes;
a shift voltage source electrically coupled to the plurality of fixed electrodes for adjusting the resonance frequency;
an amplifier having an input electrically coupled to the plurality of fixed electrodes for receiving the signal at the resonance frequency; and
a DC decoupling capacitor having a first terminal and a second terminal, the first terminal being coupled to the amplifier input and the second terminal being coupled to the shift voltage source. - View Dependent Claims (22, 23, 24, 25)
-
Specification