Liquid recovery member, substrate holding member, exposure apparatus and device manufacturing method
First Claim
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1. A liquid recovery member that is detachably held by a movable member capable of moving with respect to an optical path of an exposure light to be irradiated onto a substrate via a liquid and that comprises an opening portion in which a liquid having flowed out from an upper surface of the substrate flows.
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Abstract
A substrate holding member includes: a first holding portion that detachably holds a substrate to be immersion exposed; and a second holding portion that detachably holds a liquid recovery member, the liquid recovery member including an opening portion in which a liquid having flowed out from an upper surface of the substrate held on the first holding portion flows.
34 Citations
32 Claims
- 1. A liquid recovery member that is detachably held by a movable member capable of moving with respect to an optical path of an exposure light to be irradiated onto a substrate via a liquid and that comprises an opening portion in which a liquid having flowed out from an upper surface of the substrate flows.
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12. A substrate holding member for holding a substrate to be immersion exposed, comprising:
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a first holding portion that detachably holds a substrate; and a second holding portion that detachably holds a liquid recovery member, the liquid recovery member recovering a liquid having flowed out from an upper surface of the substrate held by the first holding portion. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32)
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Specification