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Alignment Information Display Method And Its Program, Alignment Method, Exposure Method, Device Production Process, Display System, Display Device, And Program And Measurement/Inspection System

  • US 20080106714A1
  • Filed: 08/19/2005
  • Published: 05/08/2008
  • Est. Priority Date: 08/19/2004
  • Status: Active Grant
First Claim
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1. An alignment information display method for displaying information relating to alignment measurement for positioning an object, comprising the steps of;

  • inputting data of results of predetermined processing relating to said alignment measurement,inputting information relating to a parameter of said alignment measurement,finding desired information for display from data of said input results of processing based on said input parameter, anddisplaying said found desired information for display by a predetermined display mode showing effects of said parameter of said alignment measurement on said alignment measurement.

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