Alignment Information Display Method And Its Program, Alignment Method, Exposure Method, Device Production Process, Display System, Display Device, And Program And Measurement/Inspection System
First Claim
1. An alignment information display method for displaying information relating to alignment measurement for positioning an object, comprising the steps of;
- inputting data of results of predetermined processing relating to said alignment measurement,inputting information relating to a parameter of said alignment measurement,finding desired information for display from data of said input results of processing based on said input parameter, anddisplaying said found desired information for display by a predetermined display mode showing effects of said parameter of said alignment measurement on said alignment measurement.
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Abstract
[PROBLEM] To provide an information display method enabling efficient analysis and evaluation of alignment results and thereby facilitating the setting of effective alignment conditions or parameters.
[MEANS FOR SOLUTION] The alignment information display method of the present invention receives as input the data of the results of processing relating to alignment measurement, receives as input information relating to the parameters of the alignment measurement, finds the information for display from the data of the results of processing based on the input parameters, and displays the found desired information for display by a display mode by which the effects on the alignment measurement become clear. Therefore, in setting the desired conditions, it is possible to easily confirm the results of analysis by the set conditions, that is, the effects of the set conditions. Therefore, a user can easily detect the optimum alignment conditions and parameters.
64 Citations
45 Claims
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1. An alignment information display method for displaying information relating to alignment measurement for positioning an object, comprising the steps of;
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inputting data of results of predetermined processing relating to said alignment measurement, inputting information relating to a parameter of said alignment measurement, finding desired information for display from data of said input results of processing based on said input parameter, and displaying said found desired information for display by a predetermined display mode showing effects of said parameter of said alignment measurement on said alignment measurement. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 12, 13, 14)
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11. A program for making a computer execute to display information relating to alignment measurement for positioning an object, comprising
a step of inputting data of predetermined processing results relating to said alignment measurement, a step of inputting information relating to a parameter of said alignment measurement, a step of finding desired information for display from data of said input processing results based on said input parameter, and a step of displaying said found desired information for display by a predetermined display mode showing the effects of said parameter of said alignment measurement on said alignment measurement.
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15. A display system for displaying results of functional evaluation relating to a predetermined function of a predetermined device, comprising
a storage device connected to said predetermined device in a manner enabling transmission of information and storing information relating to results of processing performed by said predetermined device in the past, a first input device for inputting a usage condition for when using said predetermined function, a simulation device connected to said storage device and said first input device in a manner enabling transmission of information and simulating processing results when performing said predetermined function under said usage condition input from said first input device based on processing results at said predetermined device stored in said storage device, a display device for displaying results of simulation by said simulation device, and a second input device for selecting and instructing a display mode for when displaying said simulation results by said display device from among a plurality of previously prepared display-modes.
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25. A display device for displaying information relating to processing results of alignment, comprising;
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a setting screen for selecting and setting any display mode from a plurality of display modes, a processing device connected to said setting screen and performing processing relating to alignment, and a result display screen connected to said processing device and displaying information relating to results of performance of said processing by the display mode set by said selection screen. - View Dependent Claims (26, 27, 28, 29, 30, 31, 32, 33)
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34. A program for making a computer system execute
a step of displaying a setting screen for selecting and setting any display mode from a plurality of display modes, a step of performing processing relating to alignment, and a step of displaying information relating to the alignment processing results by the display mode set by said setting screen.
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40. A measurement/inspection system for detecting information relating to an overlay state of different layers formed overlaid on the substrate,
said system outputting said detected information as data used for processing in a computer system by a program making said computer system execute a step of displaying a setting screen for selecting and setting any display mode among a plurality of display modes, a step of performing processing relating to alignment, and a step of displaying information relating to the alignment processing results by a display mode set by said setting screen.
Specification