×

MEMS filter module with multi-level filter traps

  • US 20080108932A1
  • Filed: 11/17/2005
  • Published: 05/08/2008
  • Est. Priority Date: 08/24/2005
  • Status: Abandoned Application
First Claim
Patent Images

1. A MEMS filter module, comprising:

  • a stack of a plurality of layers that are structurally interconnected, wherein said plurality of layers are stacked in a first dimension, wherein said stack comprises a first filtering section, wherein each layer of said plurality of layers comprises at least one flow port within said first filtering section, and wherein each said flow port extends completely through its corresponding said layer;

    a first filter trap within said first filtering section, wherein all flow through said first filter trap is in a second dimension that is different from said first dimension; and

    a second filter trap within said first filtering section, wherein all flow through said second filter trap is also in said second dimension, wherein said first and second filter traps are disposed at different locations within said first dimension, and wherein said first and second filter traps provide a greater flow resistance than each individual said flow port.

View all claims
  • 2 Assignments
Timeline View
Assignment View
    ×
    ×