MEMS filter module with multi-level filter traps

• US 20080108932A1
• Filed: 11/17/2005
• Published: 05/08/2008
• Est. Priority Date: 08/24/2005
• Status: Abandoned Application

• Current Assignee: Becton, Dickinson & Co
• Original Assignee: Becton, Dickinson & Co
• Inventors: Rodgers, M. Steven
• Application Number:
  US11/281,274
• Publication Number:
  US 20080108932A1
• Time in Patent Office: Days
• US Class Current: 604/8
• CPC Class Codes: B01D 67/0062 by micromachining techniques, e.g. using masking and etching steps, photolithography
• CPC Class Codes: B82Y 30/00 Nanotechnology for materials or surface science, e.g. nanocomposites

Abstract

A MEMS flow module (340) includes a plurality of filtering sections (344). Each filtering section (344) is defined by a stack (342) of a plurality of layers (346, 348, 350, 352). Each filtering section (344) includes at least one filter trap (364, 368) at each of at least two different levels or elevations within the stack (342). This provides for an increased flow rate through the MEMS flow module (340).

Claims

1. A MEMS filter module, comprising:

a stack of a plurality of layers that are structurally interconnected, wherein said plurality of layers are stacked in a first dimension, wherein said stack comprises a first filtering section, wherein each layer of said plurality of layers comprises at least one flow port within said first filtering section, and wherein each said flow port extends completely through its corresponding said layer;

a first filter trap within said first filtering section, wherein all flow through said first filter trap is in a second dimension that is different from said first dimension; and

a second filter trap within said first filtering section, wherein all flow through said second filter trap is also in said second dimension, wherein said first and second filter traps are disposed at different locations within said first dimension, and wherein said first and second filter traps provide a greater flow resistance than each individual said flow port.

2. The MEMS filter module of claim 1, wherein said plurality of layers comprises at least three separate layers.

3. The MEMS filter module of claim 1, wherein said plurality of layers comprises first, second, and third layers, wherein said second layer is located between said first and third layers, wherein said first filter trap is associated with a flow path between said first and second layers, and wherein said second filter trap is associated with a flow path between said second and third layers.

4. The MEMS filter module of claim 1, wherein each said layer of said plurality of layers comprises a thickness within a range of about 1 micron to about 3 microns.

5. The MEMS filter module of claim 1, wherein each said layer of said plurality of layers is associated with a different fabrication level.

6. The MEMS filter module of claim 1, wherein said first and second filter traps each have a height dimension of no more than about 0.4 microns, wherein said height dimension is orthogonal to said second dimension.

7. The MEMS filter module of claim 1, wherein said second dimension is at least substantially orthogonal to said first dimension.

8. The MEMS filter module of claim 1, wherein a flow through said first and second filter traps is in a common direction within said second dimension.

9. The MEMS filter module of claim 1, wherein a flow through said first and second filter traps are in opposite directions within said second dimension.

10. The MEMS filter module of claim 1, wherein at least one of said first and second filter traps is annular.

11. The MEMS filter module of claim 1, wherein each of said first and second filter traps is annular.

12. The MEMS filter module of claim 1, wherein said first and second filter traps are of a common configuration.

13. The MEMS filter module of claim 1, wherein said first and second filter traps are of a different configuration.

14. The MEMS filter module of claim 1, wherein said plurality of layers comprises first and second layers, wherein said first filtering section further comprises a filtering wall that extends from said first layer toward said second layer, wherein a space between a distal end of said filtering wall and said second layer defines said first filter trap.

15. The MEMS filter module of claim 14, wherein said plurality of layers comprises a first adjacent pair of layers, wherein a maximum spacing between first and second members of said first adjacent pair of layers within said first filtering section defines said second filter trap.

16. The MEMS filter module of claim 14, wherein said plurality of layers comprises a first adjacent pair of layers, wherein at least substantially planar surfaces of first and second members of said first adjacent pair of layers that face each other within said first filtering section define said first filter trap.

17. The MEMS filter module of claim 1, wherein said plurality of layers comprises first and second layers, wherein a maximum spacing between said first and second layers within said first filtering section defines said first filter trap.

18. The MEMS filter module of claim 1, wherein said plurality of layers comprises first and second layers, wherein at least substantially planar first and second surfaces of said first and second layers, respectively, are spaced from each other within said first filtering section and collectively define said first filter trap, and wherein said first and second surfaces are of a common size.

19. The MEMS filter module claim 1, wherein said first filtering section further comprises a plurality of filter traps that in turn comprise said first and second filter traps, wherein a cavity of a constant, fixed height exists between each adjacent pair of said plurality of layers, and defines a corresponding said filter trap.

20. The MEMS filter module of claim 1, further comprising a plurality of said first filtering sections.

21. The MEMS filter module of claim 1, further comprising at least one annular seal between each adjacent pair of layers of said plurality of layers, wherein said first filtering section is located inwardly of each said at least one annular seal.

22. An implant associated with a first body region and that comprises said MEMS filter module of claim 1 and a conduit, wherein said conduit comprises a flow path that is adapted to fluidly interconnect with the first body region, and wherein said MEMS filter module is disposed in said flow path.

23. The implant of claim 22, further comprising at least one housing, wherein said at least one housing is disposed within said conduit, and wherein said MEMS filter module interfaces with said at least one housing.

24. A drainage device installable in a human eye and comprising said MEMS filter module of claim 1 and a conduit, wherein said conduit comprises a flow path that is adapted to fluidly interconnect with an anterior chamber of the human eye when said drainage device is installed, and wherein said MEMS filter module is disposed in said flow path.

25. The MEMS filter module of claim 1, wherein said first filtering section further comprises a plurality of filter traps that in turn comprises said first and second filter traps, wherein said plurality of layers comprises first, second, and third layers, wherein said second layer is located between said first and third layers, wherein said at least one flow port for each of s said first, second, and third layers is selected from the group consisting of at least one of a Group I flow port, at least one of a Group II flow port, or any combination thereof, wherein each said Group I and Group II flow port has a smaller flow resistance than either of said first and second filter traps, wherein said first and second layers each comprise a first said Group I flow port, wherein said second and third layers each comprise a first said Group II flow port, wherein said first layer is devoid of any said Group II flow port, wherein said third layer is devoid of any said Group I flow port, wherein all flow between any said Group I flow port and any said Group II flow port must pass through at least one of said plurality of filter traps.

26. The MEMS filter module of claim 1, wherein said first filtering section comprises a plurality of filter traps that in turn comprises said first and second filter traps, wherein said plurality of layers comprises a first and second end layers and a first intermediate layer, wherein said first end layer comprises at least one Group I flow port and is devoid of any Group II flow port, wherein said second end layer comprises at least one said Group II flow port and is devoid of any said Group II flow port, wherein said first intermediate layer comprises at least one said Group I flow port and at least one said Group II flow port, wherein each said Group I and Group II flow port has a smaller flow resistance than each of said plurality of filter traps, and wherein all flow between any said Group I flow port of said first end layer and any said Group II flow port of said second end layer is required to pass through at least one of said plurality of filter traps.

27. The MEMS filter module of claim 1, wherein said first filtering section comprises a plurality of filter traps that in turn comprises said first and second filter traps, wherein said plurality of layers comprises a first and second end layers and at a first intermediate layer, wherein said first and second end layers each comprises at least one Group I flow port and are devoid of any Group II flow port, wherein said first intermediate layer comprises at least one said Group I flow port and at least one said Group II flow port, wherein each said Group I and Group II flow port has a smaller flow resistance than each of said plurality of filter traps, and wherein all flow between any said Group I flow port of said first end layer and any said Group I flow port of said second end layer is required to pass through at least one of said plurality of filter traps at each of two different locations within said stack in said first dimension.

28. The MEMS filter module of claim 27, wherein a flow through a first of said at least two of said plurality of filter traps is in a first direction and a flow through a second of said at least two of said plurality of filter traps is in a second direction that is different from said first direction.

29. The MEMS filter module of claim 1, wherein said first filtering section comprises a plurality of filter traps that in turn comprises said first and second filter traps, wherein said plurality of layers comprises a first and second end layers and at a first intermediate layer, wherein said first and second end layers each comprises at least one Group II flow port and are devoid of any Group I flow port, wherein said first intermediate layer comprises at least one said Group I flow port and at least one said Group II flow port, wherein each said Group I and Group II flow port has a smaller flow resistance than each of said plurality of filter traps, and wherein all flow between any said Group II flow port of said first end layer and any said Group II flow port of said second end layer is required to pass through at least one of said plurality of filter traps at each of two different locations within said stack in said first dimension.

30. The MEMS filter module of claim 1, wherein said plurality of layers comprises a first pair of adjacent layers and a second pair of adjacent layers, wherein said at least one flow port for each layer of said first and second pair of adjacent layers is selected from the group consisting of at least one Group I flow port, at least one Group II flow port, or any combination thereof, wherein each said Group I and Group II flow port has a smaller flow resistance than either of said first and second filter traps, wherein an at least substantially constant spacing exists between each layer of said first pair of adjacent layers and defines said first filter trap, wherein an at least substantially constant spacing exists between each layer of said second pair of adjacent layers and defines said second filter trap.

31. The MEMS filter module of claim 30, wherein said first and second filter traps are of a common length.

32. The MEMS filter module of claim 30, wherein said first and second filter traps are of a different length.

33. The MEMS filter module of claim 1, wherein said plurality of layers comprises a first and second end layers, at least one intermediate layer, and a plurality of filter traps that comprises said first and second filter traps, wherein said at least one flow port for each of said plurality of layers is selected from the group consisting of at least one Group I flow port, at least one Group II flow port, or any combination thereof, wherein each said Group I and Group II flow port has a smaller flow resistance than either of said first and second filter traps, wherein an at least substantially constant spacing exists between each adjacent pair of layers of said plurality of layers and defines a corresponding said filter trap, wherein said first end layer comprises at least one said Group II flow port and is devoid of any said Group I flow port, wherein each said intermediate layer comprises a plurality of said Group II flow ports and at least one said Group I flow port, and wherein said second end layer comprises a first said Group I flow port and is devoid of any said Group II flow port.

34. The MEMS filter module claim 33, wherein each said Group II flow port of said first end layer is axially aligned with one said Group II flow port from each said intermediate layer, and wherein said first said Group I flow port of each said intermediate layer and said first said Group I flow port of said second end layer are axially aligned.

35. The MEMS filter module of claim 34, wherein a size of said Group II flow ports progressively decreases from layer to layer progressing in a said second end layer, and wherein a size of said first said Group I flow ports progressively decreases from layer to layer progressing in a direction of said second end layer.

36. The MEMS filter module of claim 34, wherein each said Group II flow port is of the same size, and wherein each said first said Group I flow port is of the same size.

37. The MEMS filter module of claim 1, wherein said plurality of layers comprises first, second, and third layers, wherein said second layer is located between said first and third layers, wherein said at least one flow port for each of said first, second, and third layers is selected from the group consisting of at least one Group I flow port, at least one Group II flow port, or any combination thereof, wherein each said Group I and Group II flow port has a smaller flow resistance than either of said first and second filter traps, wherein said first and second layers each comprise a first said Group I flow port, wherein said second and third layers each comprise a first said Group II flow port, wherein said first layer is devoid of any said Group II flow port, wherein said third layer is devoid of any said Group I flow port, wherein a flow path between said first said Group II flow port of said third layer and said first said Group I flow port of said second layer includes said second filter trap, wherein a flow path between said first said Group I flow port of said second layer and said first said Group I flow port of said first layer excludes said first and second filter traps, wherein a flow path between said first said Group II flow port of said third layer and said first said Group II flow port of said second layer excludes said first and second filter traps, and wherein a flow path between said first said Group II flow port of said second layer and said first said Group I flow port of said first layer includes said first filter trap.

38. The MEMS filter module of claim 37, wherein said stack further comprises a first intermediate layer disposed between said first and second layers, wherein said at least one flow port for said first intermediate layer comprises a second said Group I flow port and a second said Group II flow port, wherein said MEMS filter module further comprises a first intermediate filter trap, wherein all flow through said first intermediate filter trap is in said second dimension, wherein said first intermediate filter trap provides a greater flow resistance that each individual said flow port, wherein a flow path between said second Group I flow port of said first intermediate layer and said first said Group I flow port of said first layer excludes said first filter trap, said second filter trap, and said first intermediate filter trap, and wherein a flow path between said second said Group II flow port of first intermediate layer and said first said Group I flow port of said first layer includes said first intermediate filter trap.

39. The MEMS filter module of claim 37, wherein said stack further comprises a first sub layer, wherein said first layer is located between said second layer and said first sub layer, wherein said at least one flow port for said first sub layer comprises a second said Group I flow port and a second said Group II flow port, wherein said MEMS filter module further comprises a first sub filter trap, wherein all flow through said first sub filter trap is in said second dimension, wherein said first sub filter trap provides a greater flow resistance that each individual said flow port, wherein a flow path between said first said Group I flow port of said first layer and said second said Group I flow port of said first sub layer excludes said first filter trap, said second filter trap, and said first sub filter trap, and wherein a flow path between said first said Group I flow port of said first layer and said second said Group II flow port of said first sub layer includes said first sub filter trap.

40. The MEMS filter module of claim 39, wherein said stack further comprises a second sub layer, wherein said first sub layer is located between said first layer and said second sub layer, wherein said at least one flow port for said second sub layer comprises a third said Group II flow port, wherein said second sub layer is devoid of any said Group I flow port, wherein said MEMS filter module further comprises a second sub filter trap, wherein all flow through each said second sub filter trap is in said second dimension, wherein said second sub filter trap provides a greater flow resistance than each individual said flow port, wherein a flow path between said second said Group II flow port of said first sub layer and said third said Group II flow port of second sub layer excludes said first flow trap, said second flow trap, said first sub filter trap, and said second sub filter trap, and wherein a flow path between said second said Group I flow port of first sub layer and said third said Group II flow port of said second sub layer includes said second sub filter trap.

41. The MEMS filter module of claim 1, wherein said plurality of layers comprises first, second, third, and fourth layers, wherein said third layer is located between said fourth layer and said second layer, wherein said second layer is located between said third layer and said first layer, wherein said at least one flow port for each of said first, second, and third layers is selected from the group consisting of at least one Group I flow port, at least one Group II flow port, or any combination thereof, wherein said MEMS filter module further comprises a third filter trap within said first filtering section that is disposed at a different elevation than each of said first and second filter traps, wherein all flow through said third filter trap is in said second dimension, wherein each said Group I and Group II flow port has a smaller flow resistance than either of said first, second filter, and third traps, wherein said fourth layer comprises a plurality of fourth said Group II flow ports and is devoid of any said Group I flow port, wherein said third layer comprises a plurality of third said Group II flow ports and a third said Group I flow port, wherein said second layer comprises a plurality of second said Group II flow ports and a second said Group I flow port, wherein said first layer comprises a first said Group I flow port and is devoid of any said Group II flow port, wherein said third filter trap is disposed in a flow path between each of said fourth said Group II flow ports and said third said Group I flow port, wherein said second filter trap is disposed in a flow path between each of said third said Group II flow ports and said second said Group I flow port, wherein said first filter trap is disposed in a flow path between each of said second said Group II flow ports and said first said Group I flow port, and wherein all flow between said plurality of fourth said Group II flow ports and said first said Group I flow port must pass through at least one of said first, second, and third filter traps.

42. The MEMS filter module claim 41, wherein each said fourth said Group II flow port is axially aligned with one said third said Group II flow port and one said second said Group to flow port, and wherein said third said Group I flow port, said second said Group I flow port, and said first said Group I flow port are axially aligned.

43. The MEMS filter module claim 42, wherein said plurality of third said Group II flow ports are disposed about said third said Group I flow port, and wherein said plurality of second said Group II flow ports are disposed about said second said Group I flow port.

44. The MEMS filter module claim 41, wherein said plurality of third said Group II flow ports are disposed about said third said Group I flow port, and wherein said plurality of second said Group II flow ports are disposed about said second said Group I flow port.

45. The MEMS filter module of claim 1, wherein said plurality of layers comprises first, second, third, fourth, and fifth layers, wherein said fourth layer is located between said fifth layer and said third layer, wherein said third layer is located between said fourth layer and said second layer, wherein said second layer is located between said third layer and said first layer, wherein said at least one flow port for each of said first, second, third, fourth, and fifth layers is selected from the group consisting of at least one Group I flow port, at least one Group II flow port, or any combination thereof, wherein said MEMS filter module further comprises third and fourth filter traps within said first filtering section, wherein all flow through each of said third and fourth filter traps is in said second dimension, wherein each of said first, second, third, and fourth filter traps are disposed at different elevations within said stack, wherein each said Group I and Group II flow port has a smaller flow resistance than either of said first, second filter, third, and fourth traps, wherein said fifth layer comprises a plurality of fifth said Group II flow ports and is devoid of any said Group I flow port, wherein said fourth layer comprises a plurality of fourth said Group II flow ports and a fourth said Group I flow port, wherein said third layer comprises a plurality of third said Group II flow ports and a third said Group I flow port, wherein said second layer comprises a plurality of second said Group II flow ports and a second said Group I flow port, wherein said first layer comprises a first said Group I flow port and is devoid of any said Group II flow port, wherein said fourth filter trap is disposed in a flow path between each of said fifth said Group II flow ports and said fourth said Group I flow port, wherein said third filter trap is disposed in a flow path between each of said fourth said Group II flow ports and said third said Group I flow port, wherein said second filter trap is disposed in a flow path between each of said third said Group II flow ports and said second said Group I flow port, wherein said first filter trap is disposed in a flow path between each of said second said Group II flow ports and said first Group I flow port, and wherein all flow between said plurality of fifth said Group II flow ports and said first Group I flow port must pass through at least one of said first, second, third, and fourth filter traps.

46. The MEMS filter module claim 45, wherein each said fifth said Group II flow port is axially aligned with one said fourth said Group II flow port, one said third said Group II flow port, and one said second said Group to flow port, and wherein said fourth said Group I flow port, said third said Group I flow port, said second said Group I flow port, and said first said Group I flow port are axially aligned.

47. The MEMS filter module claim 46, wherein said plurality of fourth said Group II flow ports are disposed about said fourth said Group I flow port, wherein said plurality of third said Group II flow ports are disposed about said third said Group I flow port, and wherein said plurality of second said Group II flow ports are disposed about said second said Group I flow port.

48. The MEMS filter module claim 45, wherein said plurality of fourth said Group II flow ports are disposed about said fourth said Group I flow port, wherein said plurality of third said Group II flow ports are disposed about said third said Group I flow port, and wherein said plurality of second said Group II flow ports are disposed about said second said Group I flow port.

49. The MEMS filter module of claim 1, wherein said plurality of layers comprises first, second, third, fourth, and fifth layers, wherein said fourth layer is located between said fifth layer and said third layer, wherein said third layer is located between said fourth layer and said second layer, wherein said second layer is located between said third layer and said first layer, wherein said at least one flow port for each of said first, second, third, fourth, and fifth layers is selected from the group consisting of at least one Group I flow port, at least one Group II flow port, or any combination thereof, wherein said MEMS filter module further comprises third and fourth filter traps within said first filtering section, wherein all flow through each of said third and fourth filter traps is in said second dimension, wherein each of said first, second, third, and fourth filter traps are disposed at different elevations within said stack, wherein each said Group I and Group II flow port has a smaller flow resistance than either of said first, second filter, third, and fourth traps, wherein said fifth layer comprises a plurality of fifth said Group II flow ports and is devoid of any said Group I flow port, wherein said fourth layer comprises a plurality of fourth said Group II flow ports and a fourth said Group I flow port, wherein said third layer comprises a third said Group I flow port and is devoid of any said Group II flow port, wherein said second layer comprises a plurality of second said Group II flow ports and a second Group I flow port, wherein said first layer comprises a plurality of first said Group II flow ports and is devoid of any said Group I flow port, wherein said fourth filter trap is disposed in a flow path between each of said fifth said Group II flow ports and said fourth said Group I flow port, wherein said third filter trap is disposed in a flow path between each of said fourth said Group II flow ports and said third said Group I flow port, wherein said second filter trap is disposed in a flow path between said third Group I flow port and each of said second said Group II flow ports, wherein said first filter trap is disposed in a flow path between said second said Group I flow port and each of said first said Group II flow ports, and wherein all flow between said plurality of fifth said Group II flow ports and said plurality of first said Group II flow ports must pass through at least one of said third and fourth filter traps and also must pass through at least one of said first and said second filter traps.

50. The MEMS filter module claim 49, wherein each said fifth said Group II flow port is axially aligned with one said fourth said Group II flow port, wherein each said second said Group II flow port is axially aligned with one said first said Group II flow port, and wherein said fourth said Group I flow port, said third said Group I flow port, and said second said Group I flow port are axially aligned.

51. The MEMS filter module claim 50, wherein said plurality of fourth said Group II flow ports are disposed about said fourth said Group I flow port, and wherein said plurality of second said Group II flow ports are disposed about said second said Group I flow port.

52. The MEMS filter module claim 50, wherein said plurality of fourth said Group II flow ports are disposed about said fourth said Group I flow port, and wherein said plurality of second said Group II flow ports are disposed about said second said Group I flow port.

53. The MEMS filter module of claim 1, wherein said plurality of layers comprises first, second, third, fourth, and fifth layers, wherein said fourth layer is located between said fifth layer and said third layer, wherein said third layer is located between said fourth layer and said second layer, wherein said second layer is located between said third layer and said first layer, wherein said at least one flow port for each of said first, second, third, fourth, and fifth layers is selected from the group consisting of at least one Group I flow port, at least one Group II flow port, or any combination thereof, wherein said MEMS filter module further comprises third and fourth filter traps within said first filtering section, wherein all flow through each of said third and fourth filter traps is in said second dimension, wherein each of said first, second, third, and fourth filter traps are disposed at different elevations within said stack, wherein each said Group I and Group II flow port has a smaller flow resistance than either of said first, second filter, third, and fourth traps, wherein said fifth layer comprises a fifth said Group I flow port and is devoid of any said Group II flow port, wherein said fourth layer comprises a plurality of fourth said Group II flow ports and a fourth said Group I flow port, wherein said third layer comprises a plurality of third said Group II flow ports and is devoid of any said Group I flow port, wherein said second layer comprises a plurality of second said Group II flow ports and a second said Group I flow port, wherein said first layer comprises a first said Group I flow port and is devoid of any said Group II flow port, wherein said fourth filter trap is disposed in a flow path between said fifth said Group I flow port and each of said fourth said Group II flow ports, wherein said third filter trap is disposed in a flow path between said fourth said Group I flow port and each of said third said Group II flow ports, wherein said second filter trap is disposed in a flow path between each of said third said Group II flow ports and said second said Group I flow port, wherein said first filter trap is disposed in a flow path between each of said second said Group II flow ports and said first said Group I flow port, and wherein all flow between said fifth said Group I flow port and said first said Group I flow port must pass through at least one of said third and fourth filter traps and also must pass through at least one of said first and said second filter traps.

54. The MEMS filter module claim 53, wherein each said fourth said Group II flow port is axially aligned with one said third said Group II flow port and with one said second said Group II flow port, and wherein said fifth said Group I flow port, said fourth said Group I flow port, said second said Group I flow port, and said first said Group I flow port are s axially aligned.

55. The MEMS filter module claim 54, wherein said plurality of fourth said Group II flow ports are disposed about said fourth said Group I flow port, and wherein said plurality of second said Group II flow ports are disposed about said second said Group I flow port.

56. The MEMS filter module claim 53, wherein said plurality of fourth said Group II flow ports are disposed about said fourth said Group I flow port, and wherein said plurality of second said Group II flow ports are disposed about said second said Group I flow port.

57. A MEMS filter module, comprising:

a first pair of fabrication levels comprising a first pair of structures that collectively define a first filter trap, wherein each member of said first pair of structures is in a different fabrication level of said first pair of fabrication levels; and

a second pair of fabrication levels comprising a second pair of structures that collectively define a second filter trap, wherein each member of said second pair of structures is in a different fabrication level of said second pair of fabrication levels.