Photo-induced sensitivity and selectivity of semiconductor gas sensors
First Claim
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1. A selective gas sensor, comprising:
- a semiconducting substrate;
a narrow band radiation source that directs narrowband radiation to the semiconducting substrate, wherein the mean energy of the narrowband radiation is less than the bandgap energy of the semiconducting substrate;
a plurality of electrodes coupled to the semiconducting substrate, whereby a gas is selectively sensed; and
a controller that sequentially directs distinct narrow band radiation to the semiconductor substrate and measures the resistance of the substance through the electrodes, whereby distinct gases are sensed as a function of time.
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Abstract
A selective gas sensor comprises a semiconducting substrate, a radiation source that directs narrowband radiation to the semiconducting substrate; and a plurality of electrodes coupled to the semiconducting substrate, whereby a gas is selectively sensed. A method of selectively sensing a gas comprises the steps of contacting the semiconducting substrate with a gas, directing narrowband radiation to the semiconducting substrate and sensing the resistance of the semiconducting substrate, thereby selectively sensing the gas.
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Citations
54 Claims
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1. A selective gas sensor, comprising:
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a semiconducting substrate;
a narrow band radiation source that directs narrowband radiation to the semiconducting substrate, wherein the mean energy of the narrowband radiation is less than the bandgap energy of the semiconducting substrate;
a plurality of electrodes coupled to the semiconducting substrate, whereby a gas is selectively sensed; and
a controller that sequentially directs distinct narrow band radiation to the semiconductor substrate and measures the resistance of the substance through the electrodes, whereby distinct gases are sensed as a function of time. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A method of selectively sensing a gas, comprising the steps of:
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contacting a semiconducting substrate that is coupled to a plurality of electrodes with a gas having distinct gas components;
sequentially directing distinct narrowband radiation to the semiconducting substrate, wherein the mean energy of the narrowband radiation is less than the bandgap energy of the semiconducting substrate; and
measuring the resistance of the substrate through the electrodes, whereby the distinct gases are sensed as a function of time. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49)
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50. A selective gas sensor, comprising:
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a semiconducting substrate;
a solid state narrowband radiation source integrated with the semiconducting substrate that directs narrowband radiation to the semiconducting substrate, wherein the mean energy of the narrowband radiation is less than the bandgap energy of the semiconducting substrate;
the narrowband radiation is selectively absorbed by a complex, the complex comprising the semiconducting substrate and the gas to be selectively sensed; and
a plurality of electrodes coupled to the semiconducting substrate, whereby a gas is selectively sensed; and
a controller that sequentially directs distinct narrowband radiation to the semiconductor substrate and measures radiation through the electrodes, whereby distinct gases are sensed as a function of time. - View Dependent Claims (51, 52)
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53. A method of selectively sensing a gas, comprising the steps of:
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contacting a semiconducting substrate that is coupled to a plurality of electrodes with a gas having distinct gas components;
sequentially directing distinct narrowband radiation to the semiconducting substrate from a solid state narrowband radiation source integrated with the semiconducting substrate, wherein the mean energy of the narrowband radiation is less than the bandgap energy of the semiconducting substrate;
the narrowband radiation is selectively absorbed by a complex, the complex comprising the semiconducting substrate and the gas; and
measuring the resistance of the substrate through the electrodes, whereby the distinct gases are sensed as a function of time. - View Dependent Claims (54)
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Specification