METHODS AND DEVICES FOR INHIBITING TILTING OF A MIRROR IN AN INTERFEROMETRIC MODULATOR
First Claim
Patent Images
1. A method of manufacturing an interferometric modulator, the method comprising:
- forming an optical stack over a substrate;
depositing a sacrificial layer over the optical stack;
forming a reflective layer over the sacrificial layer;
forming a hole through the sacrificial layer;
forming at least one stationary member comprising a first portion formed in the hole and a second portion connected to the first portion, the second portion of the at least one stationary member formed over at least a portion of the reflective layer; and
removing the sacrificial layer, the reflective layer mechanically coupled to the substrate.
3 Assignments
0 Petitions
Accused Products
Abstract
Interferometric modulators having a separable modulator architecture are disclosed having a reflective layer suspended from a flexible layer over a cavity. The interferometric modulators have one or more anti-tilt members that inhibit undesirable movement of the reflective layer, such as curling and/or tilting. The stabilization of the reflective layer by the anti-tilt members can improve the quality of the optical output of the interferometric modulators, as well as displays comprising such interferometric modulators.
171 Citations
28 Claims
-
1. A method of manufacturing an interferometric modulator, the method comprising:
-
forming an optical stack over a substrate;
depositing a sacrificial layer over the optical stack;
forming a reflective layer over the sacrificial layer;
forming a hole through the sacrificial layer;
forming at least one stationary member comprising a first portion formed in the hole and a second portion connected to the first portion, the second portion of the at least one stationary member formed over at least a portion of the reflective layer; and
removing the sacrificial layer, the reflective layer mechanically coupled to the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
-
-
18. A method of manufacturing at least two optical modulators, the method comprising:
-
forming an optical stack over a substrate;
depositing a sacrificial layer over the optical stack;
forming a reflective layer over the sacrificial layer;
patterning at least two mirrors out of the reflective layer;
forming a hole through the sacrificial layer;
forming at least one stationary member comprising a first portion formed in the hole, and a second portion connected to the first portion, the second portion contacting a first mirror of the at least two mirrors and contacting a second mirror of the at least two mirrors; and
removing the sacrificial layer, the two mirrors mechanically coupled to the substrate. - View Dependent Claims (19, 20, 21)
-
-
22. A method of manufacturing a device, the method comprising:
forming an array of optical modulators, each optical modulator comprising;
an optical stack over a substrate, the optical stack being at least partially transmissive and at least partially reflective, and the optical stack comprising a first electrically conductive layer;
a movable element over the optical stack, separated from the optical stack by a first distance when the movable element is in a first position, wherein the movable element is in a relaxed state when in the first position and the movable element is mechanically coupled to the substrate; and
at least one stationary member comprising a first portion and a second portion connected to the first portion, the second portion of the at least one stationary member contacting at least a portion of the movable element in the first position;
wherein the movable element moves from the first position to a second position in response to a voltage difference applied between the first electrically conductive layer and the movable element, the movable element being separated from the optical stack by a second distance in the second position, the first distance being greater than the second distance. - View Dependent Claims (23, 24, 25, 26, 27, 28)
Specification