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METHODS AND DEVICES FOR INHIBITING TILTING OF A MIRROR IN AN INTERFEROMETRIC MODULATOR

  • US 20080110855A1
  • Filed: 01/15/2008
  • Published: 05/15/2008
  • Est. Priority Date: 09/27/2004
  • Status: Abandoned Application
First Claim
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1. A method of manufacturing an interferometric modulator, the method comprising:

  • forming an optical stack over a substrate;

    depositing a sacrificial layer over the optical stack;

    forming a reflective layer over the sacrificial layer;

    forming a hole through the sacrificial layer;

    forming at least one stationary member comprising a first portion formed in the hole and a second portion connected to the first portion, the second portion of the at least one stationary member formed over at least a portion of the reflective layer; and

    removing the sacrificial layer, the reflective layer mechanically coupled to the substrate.

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