Radiation Beam Pulse Trimming
First Claim
Patent Images
1. A system, comprising:
- radiation source configured to generate a polarized beam of radiation;
an electro-optical modulator, formed of crystalline quartz, which is configured to modulate the beam of radiation; and
a beam splitter configured to direct a first portion of the beam to a beam dump and to form an output beam from a second portion of the beam.
1 Assignment
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Accused Products
Abstract
A system is used to perform fast and slow applications, for example fast application can be pulse trimming. The system includes a radiation source, an electro-optical modulator, and a beam splitter. The radiation source is configured to generate a polarized beam of radiation. The electro-optical modulator, formed of crystalline quartz, is configured to modulate the beam of radiation. The beam splitter is configured to direct a first portion of the beam to a beam dump and to form an output beam from a second portion of the beam.
34 Citations
68 Claims
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1. A system, comprising:
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radiation source configured to generate a polarized beam of radiation; an electro-optical modulator, formed of crystalline quartz, which is configured to modulate the beam of radiation; and a beam splitter configured to direct a first portion of the beam to a beam dump and to form an output beam from a second portion of the beam. - View Dependent Claims (2, 3, 4, 5, 6, 7, 10, 57, 62, 63)
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8-9. -9. (canceled)
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11-13. -13. (canceled)
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14. A lithography system, comprising:
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an illumination system configured to generate a polarized illumination beam of radiation, comprising, an electro-optical modulator, formed of crystalline quartz, which is configured to modulate the beam of radiation; and a beam splitter configured to direct a first portion of the beam to a beam dump and to form the illumination beam from a second portion of the beam, a patterning device that patterns the illumination beam of radiation; and a projection system that projects the patterned beam onto a target portion of a substrate.
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15-23. -23. (canceled)
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24. A method, comprising:
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(a) modulating a polarized beam of radiation using an electro-optical modulator formed of crystalline quartz; (b) directing a first portion of the modulated beam to a beam dump using a beam splitter; and (c) forming an output beam from a second portion of the modulated beam using the beam splitter. - View Dependent Claims (25, 26, 27, 28, 29, 30, 33, 59, 66, 67)
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31-32. -32. (canceled)
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34-36. -36. (canceled)
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37. A laser that outputs an output beam, comprising:
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an electro-optical modulator, formed of crystalline quartz, which is configured to modulate a polarized beam of radiation; and a beam splitter configured to direct a first portion of the beam to a beam dump and to form the output beam from a second portion of the beam.
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38-46. -46. (canceled)
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47. An illuminator that outputs a processed beam, comprising:
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an electro-optical modulator, formed of crystalline quartz, which is configured to modulate a polarized beam of radiation; and a beam splitter configured to direct a first portion of the beam to a beam dump and to form an output beam from a second portion of the beam; and an optical system configured to process the output beam to produce the processed beam.
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48-56. -56. (canceled)
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58. (canceled)
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60-61. -61. (canceled)
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64-65. -65. (canceled)
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68-71. -71. (canceled)
Specification