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METHODS AND DEVICES FOR INHIBITING TILTING OF A MOVABLE ELEMENT IN A MEMS DEVICE

  • US 20080112035A1
  • Filed: 01/15/2008
  • Published: 05/15/2008
  • Est. Priority Date: 09/27/2004
  • Status: Active Grant
First Claim
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1. A microelectromechanical systems (MEMS) device comprising:

  • a substrate;

    an electrically conductive layer over the substrate;

    a movable element positioned over the substrate and movable between a first position spaced from the substrate by a first distance and a second position spaced from the substrate by a second distance, the first distance being greater than the second distance, and the movable element having a first surface facing away from the substrate and a second surface facing towards the substrate;

    at least one stationary member contacting the first surface of the movable element when the movable element is in the first position, wherein the at least one stationary member is configured to inhibit movement of at least a portion of the movable element when the movable element is in the first position, and further wherein the second surface of the movable element is substantially parallel to the substrate when the movable element is in the first position and the second position; and

    a mechanical layer coupled to the movable element, wherein the mechanical layer exerts a force on the movable element that facilitates contact between the at least one stationary member and the first surface of the movable element when the movable element is in the first position.

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