Removable compartments for workpiece stocker

• US 20080112787A1
• Filed: 07/25/2007
• Published: 05/15/2008
• Est. Priority Date: 11/15/2006
• Status: Abandoned Application

• Current Assignee: Dynamic Micro Systems
• Original Assignee: Dynamic Micro Systems
• Inventors: Rebstock, Lutz
• Application Number:
  US11/881,086
• Publication Number:
  US 20080112787A1
• Time in Patent Office: Days
• US Class Current: 414/749.1
• CPC Class Codes: H01L 21/67201 characterized by the construction of the load-lock chamber
• CPC Class Codes: H01L 21/67769 Storage means
• CPC Class Codes: H01L 21/67775 Docking arrangements
• CPC Class Codes: H01L 21/67778 involving loading and unloading of wafers

Abstract

The present invention discloses apparatuses and method for configuring a compartmentable equipment to accommodate emergency responses. An exemplary equipment comprises a plurality of removable compartments for storing workpieces so that in emergency events, such as power failure or equipment failure, the workpieces can be removed from the equipment for continuing processing without disrupting the flow of the fabrication facility. The compartmentable equipment can comprise emergency access ports, including mating interface to a portable workpiece removal equipment to allow accessing the individual compartments without compromising the quality, defects and yield of the workpieces stored in the stocker.

Claims

1. A method for improving the operation of a workpiece stocker, the stocker comprising

a chamber for storing a plurality of workpieces, the chamber being compartmentalized into a plurality of compartments;

a robotic mechanism to transfer the workpieces from the chamber to an IO station; and

a plurality of emergency access ports for accessing the workpieces in the event of the robotic failure,

the method comprising

assessing that the robotic mechanism fails; and

emergency accessing a compartment without contaminating other compartments.

2. A method as in claim 1 wherein the robotic failure is detected through a sensor mechanism.

3. A method as in claim 1 further comprising

sealing all compartments individually after determining the robotic failure.

4. A method as in claim 1 wherein one compartment is unsealed for emergency access while other compartments remain sealed.

5. A method as in claim 1 further comprising

installing a load lock for the emergency access port of the unseal compartment before unsealing the compartment.

6. A method as in claim 1 further comprising

installing a portable workpiece removal equipment connecting to the emergency access port of the unseal compartment.

7. A method as in claim 1 further comprising

installing a load lock for the emergency access port of the unseal compartment before unsealing the compartment;

and

installing a portable workpiece removal equipment connecting to the emergency access port of the unseal compartment.

8. A method for improving the operation of a workpiece stocker, the stocker comprising

a chamber for storing a plurality of workpieces, the chamber being compartmentalized into a plurality of sealed compartments;

a robotic mechanism to transfer the workpieces from the chamber to an IO station; and

a plurality of emergency access ports for accessing the workpieces in the event of the robotic failure,

the method comprising

determining the current compartment having the workpiece to be accessed;

unsealing the current compartment;

transferring the workpiece within the current compartment; and

re-sealing the current compartment,

wherein the workpieces are prevented from contamination by being sealed within the compartments when the chamber is exposed to the outside ambient during an emergency access.

9. A method as in claim 8 further comprising

determining the next compartments to be needed after the current compartment;

unsealing the next compartments.

10. A method as in claim 9 wherein the determining the next compartment determines at least one compartment to be needed after the current compartment.

11. A method as in claim 8 wherein the workpiece stocker comprises a controller for determining the individual compartments needed to be unsealed.

12. A method as in claim 8 wherein the robotic failure is detected through a sensor mechanism.

13. A method as in claim 8 further comprising

sealing all compartments after determining the robotic failure.

14. A method for improving the operation of a workpiece stocker, the stocker comprising

a chamber for storing a plurality of workpieces;

a robotic mechanism to transfer the workpieces from the chamber to an IO station; and

an emergency access port for accessing the workpieces in the event of the robotic failure, the emergency access port comprising

a mating interface to a portable workpiece removal equipment,

the method comprising

mating the emergency access port to a portable workpiece removal equipment;

removing the workpieces without exposing the workpieces to outside ambient.

15. A method as in claim 14 further comprising

installing a portable clean room for mating with the mating interface.

16. A method as in claim 14 further comprising

installing a load lock for the emergency access ports.

17. A method as in claim 14 wherein the emergency access port is accessed by an operator.