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X-Y AXIS DUAL-MASS TUNING FORK GYROSCOPE WITH VERTICALLY INTEGRATED ELECTRONICS AND WAFER-SCALE HERMETIC PACKAGING

  • US 20080115579A1
  • Filed: 02/05/2008
  • Published: 05/22/2008
  • Est. Priority Date: 11/18/2005
  • Status: Active Grant
First Claim
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1. A sensor for measuring angular velocity in a sensor plane, the sensor comprising:

  • a) a sensing subassembly comprising;

    i) a substantially planar frame parallel to said plane;

    ii) a first mass disposed in said plane;

    iii) a second mass disposed in said plane laterally to said first mass; and

    iv) a linkage within said frame and connected to said frame, wherein said linkage is connected to said first mass and to said second mass and wherein said linkage constrains said first and second masses to move in opposite directions perpendicular to said plane;

    wherein said linkage further comprises;

    a center plate connected to said frame and connected to and in between said first and second masses, wherein said center plate is rotatable about a center axis of rotation;

    a first edge plate connected to a base via a drive anchor portion of the base and to said first mass, wherein said first edge plate is rotatable about a first axis of rotation; and

    a second edge plate connected to the base via a drive anchor portion of the base and to said second mass, wherein said second edge plate is rotatable about a second axis of rotation;

    wherein said center, first and second axes of rotation are parallel to each other and are also parallel to said sensor plane;

    b) an actuator for driving a first portion of said subassembly into oscillation at a drive frequency; and

    c) a transducer for sensing motion of a second portion of said subassembly responsive to said angular velocity,

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