Multiple Station Scan Displacement Invariant Laser Ablation Apparatus

• US 20080116182A1
• Filed: 11/21/2006
• Published: 05/22/2008
• Est. Priority Date: 11/21/2006
• Status: Abandoned Application

• Current Assignee: Palo Alto Research Center, Inc. (Xerox Holdings Corp.)
• Original Assignee: Palo Alto Research Center, Inc. (Xerox Holdings Corp.)
• Inventors: Curry, Douglas N.
• Application Number:
  US11/562,383
• Publication Number:
  US 20080116182A1
• Time in Patent Office: Days
• US Class Current: 219/121.75
• CPC Class Codes: B23K 2101/40 Semiconductor devices
• CPC Class Codes: B23K 26/0624 using ultrashort pulses, i.e. pulses of 1ns or less
• CPC Class Codes: B23K 26/067 Dividing the beam into multiple beams, e.g. multifocusing
• CPC Class Codes: H01L 31/1876 Particular processes or apparatus for batch treatment of the devices
• CPC Class Codes: Y02E 10/50 Photovoltaic [PV] energy
• CPC Class Codes: Y02P 70/50 Manufacturing or production processes characterised by the final manufactured product

Abstract

A laser scanning mechanism and multiple processing stations are circumferentially disposed around a central axis. The laser scanning mechanism includes a rotating member driven by a motor to rotate around the central axis, and an optical system fixedly mounted on the rotating member and arranged to redirect input laser beam pulses from the central axis along a circular scan path. Each station including a mechanism for moving a corresponding target object radially across the circular scan path. The laser beam pulses output from the scanning mechanism can be used to process (e.g., ablate material from) multiple target objects simultaneously. The laser scanning mechanism redirects the input laser beam pulses such that the laser beams remain on-axis and in focus as they are scanned along the circular (curved) scan path. A system for producing photovoltaic devices utilizes the laser ablation apparatus and a direct-write metallization apparatus.

Claims

1. A multi-station laser ablation apparatus for simultaneously micro-machining a plurality of target objects, wherein the system comprises:

a laser device for selectively generating a plurality of input laser beam pulses along a central axis;

a laser scanning mechanism including a rotating member disposed to rotate around the central axis, and an optical system that is fixedly mounted on the rotating member and arranged such that the plurality of input laser beam pulses are redirected from the central axis to a circular scan path defined around the central axis, whereby output laser beam pulses are selectively produced on the circular scan path, and

a plurality of stations circumferentially disposed around the central axis, each station including means for moving a corresponding one of the plurality of target objects in a corresponding radial direction relative to the central axis such that said corresponding target object intersects a corresponding portion of the circular scan path.

2. The multi-station laser ablation apparatus of claim 1,

wherein the rotating member of the laser scanning mechanism includes a first portion disposed to rotate around the central axis, and a second portion disposed away from the central axis,

wherein the optical system comprises:

a first optical element fixedly disposed on the first portion of the rotating member such that the central axis intersects a portion of the first optical element,

a second optical element disposed on the second portion of the rotating member, and

a focusing element disposed on the rotating member in fixed relation to the second optical element, and

wherein the first and second optical elements are arranged such that the first optical element redirects the plurality of input laser beam pulses from the central axis to the second optical element, wherein the second optical element redirects the laser beam pulse received from the first optical element through the focusing element toward the circular scan path, and wherein the focusing element is disposed to focus the output laser beam pulses such that a focal point of each output laser beam pulse coincides with the circular scan path.

3. The multi-station laser ablation apparatus of claim 2,

wherein the first and second optical elements comprise mirrors having respective flat reflective surfaces that are parallel, and

wherein the focusing element comprises an objective lens disposed between the second mirror and the focal point.

4. The multi-station laser ablation apparatus of claim 3,

wherein the first mirror is disposed at a fixed distance from the second mirror, and

wherein the objective lens is disposed at a fixed distance from the second mirror.

5. The multi-station laser ablation apparatus of claim 1, further comprising means for controlling the laser device to selectively generate the plurality of input laser beam pulses when the rotating member of the laser scanning mechanism is positioned over a predetermined portion of the passivation layer of an associated one of said semiconductor substrates.

6. The multi-station laser ablation apparatus of claim 5, wherein said means for controlling the laser device comprises an electronic registration device disposed adjacent to at least one of said plurality of stations.

7. The multi-station laser ablation apparatus of claim 1,

wherein each of the plurality of target objects comprises a semiconductor substrate including doped regions diffused into a surface thereof and a passivation layer formed thereon, and

wherein said means for moving said corresponding photovoltaic device in said corresponding radial direction comprises means for maintaining said corresponding target object such that ablated regions defined in the passivation layer by said output laser beam pulses are substantially parallel to said corresponding radial direction.

8. The multi-station laser ablation apparatus of claim 1, wherein the laser device is a femto-second laser device.

9. The multi-station laser ablation apparatus of claim 1, further comprising a positioning cam disposed around the central axis for controlling associated positions of each of the plurality of target objects in said corresponding radial direction.

10. A system for producing a plurality of photovoltaic devices, each photovoltaic device including a semiconductor substrate having a passivation layer disposed on a surface thereof, wherein the system comprises:

a laser device for selectively generating a plurality of input laser beam pulses along a central axis;

a laser scanning mechanism including a rotating member disposed to rotate around the central axis, and an optical system that is fixedly mounted on the rotating member and arranged such that the plurality of input laser beam pulses are redirected from the central axis to a circular scan path defined around the central axis, whereby output laser beam pulses are selectively produced on the circular scan path, and

a plurality of stations circumferentially disposed around the central axis, each station including means for moving a corresponding one of the plurality of photovoltaic devices in a corresponding radial direction relative to the central axis such that said corresponding photovoltaic device intersects a corresponding portion of the circular scan path.

11. The system of claim 10, wherein the laser device is a femto-second laser device.

12. The system of claim 10,

wherein the rotating member of the laser scanning mechanism includes a first portion disposed to rotate around the central axis, and a second portion disposed away from the central axis,

wherein the optical system comprises:

a first optical element fixedly disposed on the first portion of the rotating member such that the central axis intersects a portion of the first optical element,

a second optical element disposed on the second portion of the rotating member, and

a focusing element disposed on the rotating member in fixed relation to the second optical element, and

wherein the first and second optical elements are arranged such that the first optical element redirects the plurality of input laser beam pulses from the central axis to the second optical element, wherein the second optical element redirects the laser beam pulse received from the first optical element through the focusing element toward the circular scan path, and wherein the focusing element is disposed to focus the output laser beam pulses such that a focal point of each output laser beam pulse coincides with the circular scan path.

13. The system of claim 12,

wherein the first and second optical elements comprise mirrors having respective flat reflective surfaces that are parallel, and

wherein the focusing element comprises an objective lens disposed between the second mirror and the focal point.

14. The system of claim 13,

wherein the first mirror is disposed at a fixed distance from the second mirror, and

wherein the objective lens is disposed at a fixed distance from the second mirror.

15. The system of claim 10, further comprising means for controlling the laser device to selectively generate the plurality of input laser beam pulses when the rotating member of the laser scanning mechanism is positioned over a predetermined portion of the passivation layer of an associated one of said semiconductor substrates.

16. The system of claim 15, wherein said means for controlling the laser device comprises an electronic registration device disposed adjacent to at least one of said plurality of stations.

17. The system of claim 10,

wherein each of the plurality of photovoltaic devices includes doped regions diffused into a surface of its associated semiconductor substrate, and

wherein said means for moving said corresponding photovoltaic device in said corresponding radial direction comprises means for maintaining said corresponding photovoltaic device such that the doped regions are substantially parallel to said corresponding radial direction.

18. The system of claim 10, further comprising a direct-write metallization apparatus including:

means for depositing a conductive material into each of the plurality of contact openings;

means for moving the semiconductor substrate in a direction parallel to the corresponding radial direction.

19. The system of claim 10, further comprising a positioning cam disposed around the central axis for controlling associated positions of each of the plurality of photovoltaic devices in said corresponding radial direction.

20. The system of claim 10, further comprising a plurality of processing apparatus, each processing apparatus including:

a loader/unloader robot for loading unprocessed ones of said plurality of photovoltaic devices onto an associated one of said plurality of stations, and for unloading processed ones of said plurality of photovoltaic devices from said associated one of said plurality of stations, and

a direct-write metallization apparatus including means for depositing a conductive material onto said processed ones of said plurality of photovoltaic devices.