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INSPECTION DEVICE AND INSPECTION METHOD FOR ACTIVE MATRIX PANEL, AND MANUFACTURING METHOD FOR ACTIVE MATRIX ORGANIC LIGHT EMITTING DIODE PANEL

  • US 20080117144A1
  • Filed: 10/29/2007
  • Published: 05/22/2008
  • Est. Priority Date: 05/21/2003
  • Status: Active Grant
First Claim
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1. An inspection device for an active matrix panel for inspecting an active matrix panel prior to formation of an organic light emitting diode, comprising:

  • voltage changing means for changing a voltage on inspection wiring for a driving thin film transistor constituting the active matrix panel; and

    measuring means for measuring a transient current flowing on wiring on a source side of the driving thin film transistor when the voltage on the inspection wiring is changed by the voltage changing means, and for measuring variation in parasitic capacitance between an off state and an on state of the driving thin film transistor.

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