BEAM HOMOGENIZER, LASER IRRADIATION APPARATUS, AND LASER IRRADIATION METHOD
First Claim
1. A beam homogenizer comprising:
- a pair of mirrors provided parallel to a direction of a laser beam travels, each having a reflecting surface facing each other;
a laser input portion at which the laser beam enters;
a laser output portion at which the laser beam exits; and
means for vibrating the pair of the mirrors at a first frequency.
1 Assignment
0 Petitions
Accused Products
Abstract
An effect of interference is eliminated and intensity of a laser beam is homogenized. The beam homogenizer 100 includes reflecting mirrors 103 and 104 which are provided so that reflecting surfaces thereof face each other. The laser beam LB propagates through a space between the reflecting mirrors 103 and 104 while being reflected therebetween, so that intensity distribution of the laser beam LB is homogenized, but the laser beam LB also interferes. The first reflecting mirror 103 and the second reflecting mirror 104 are oscillated in a direction perpendicular to a direction in which the laser beam LB is scanned, intensity distribution of the laser beam LB in an oscillation direction is temporally averaged.
17 Citations
40 Claims
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1. A beam homogenizer comprising:
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a pair of mirrors provided parallel to a direction of a laser beam travels, each having a reflecting surface facing each other; a laser input portion at which the laser beam enters; a laser output portion at which the laser beam exits; and means for vibrating the pair of the mirrors at a first frequency. - View Dependent Claims (2, 3)
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4. A laser irradiation apparatus comprising:
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a laser oscillator outputting a laser beam; a beam homogenizer provided on an exit side of the laser oscillator, wherein the beam homogenizer including; a pair of mirrors provided parallel to a direction of a laser beam travels, each having a reflecting surface facing each other; a laser input portion at which the laser beam enters; a laser output portion at which the laser beam exits; means for vibrating the pair of the mirrors at a first frequency; and a projection lens provided on an exit side of the beam homogenizer. - View Dependent Claims (5, 6, 7, 8, 9, 10, 11)
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12. A laser irradiation apparatus comprising:
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a laser oscillator outputting a laser beam; a slit provided on an exit side of the laser oscillator at which the laser beam passes; means for vibrating the slit at a first frequency; and a projection lens provided on an exit side of the slit, projecting the laser beam on a surface to be irradiated. - View Dependent Claims (13, 14, 15, 16, 17, 18)
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19. A laser irradiation apparatus comprising:
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a laser oscillator outputting a laser beam; a beam homogenizer provided on an exit side of the laser oscillator, wherein the beam homogenizer including; a pair of mirrors provided parallel to a direction of a laser beam travels, reflecting surfaces thereof facing each other; a laser input portion at which the laser beam enters; a laser output portion at which the laser beam exits; a projection lens provided on an exit side of the beam homogenizer; and means for vibrating the projection lens at a first frequency. - View Dependent Claims (20, 21)
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22. A laser irradiation apparatus comprising:
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a laser oscillator outputting a laser beam; a slit provided on an exit side of the laser oscillator at which the laser beam passing; a projection lens provided on an exit side of the slit, projecting the laser beam on a surface to be irradiated; and means for vibrating the projection lens at a first frequency. - View Dependent Claims (23, 24, 25)
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26. A laser irradiation method comprising:
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passing a laser beam through a beam homogenizer; and irradiating an object to be irradiated with the laser beam, wherein the beam homogenizer includes a pair of mirrors provided parallel to a direction of the laser beam travels, each having a reflecting surface facing each other, wherein irradiation with the laser beam is performed while the pair of the mirrors of the homogenizer is vibrated at a first frequency. - View Dependent Claims (27, 28)
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29. A laser irradiation method comprising:
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entering a laser beam into a beam homogenizer; shielding ends of the laser beam emitted from the beam homogenizer; and irradiating an object to be irradiated with the laser beam of which the ends are shielded, wherein the beam homogenizer includes a pair of mirrors provided parallel to a direction of the laser beam travels, each having a reflecting surface facing each other; and wherein irradiation with the laser beam is performed while the pair of mirrors of the beam homogenizer is vibrated at a first frequency. - View Dependent Claims (30, 31)
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32. A laser irradiation method comprising:
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irradiating an object to be irradiated with a laser beam which has made to pass through a slit, wherein the slit is vibrated at a first frequency. - View Dependent Claims (33, 34, 35, 36)
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37. A laser irradiation method comprising:
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passing a laser beam through a beam homogenizer including a first reflecting mirror and a second reflecting mirror which are provided so that reflecting surfaces thereof face each other; and projecting the laser beam which has passed through the beam homogenizer on an object to be irradiated, wherein irradiation with the laser beam is performed while the projection lens is vibrated at a first frequency. - View Dependent Claims (39)
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38. A laser irradiation method comprising:
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passing a laser beam through a slit; and projecting the laser beam which has passed through the slit on an object to be irradiated, wherein irradiation with the laser beam is performed while the projection lens is vibrated at a first frequency. - View Dependent Claims (40)
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Specification