MEMS GYROSCOPE
First Claim
1. A micro-gyro device for measuring rotational movement about an input axis, comprising:
- a driving element generating a driving signal;
a MEMS gyro including a motor rotor and a motor assembly, the motor rotor receiving the driving signal and oscillating about a motor axis at a frequency determined as a function of the driving signal, the motor assembly oscillating around a rate axis, which is orthogonal to the motor axis, as a function of the frequency of the motor rotor oscillation, a capacitance of the motor assembly changing as a function of the oscillation of the motor assembly;
driving element feedback circuitry, including a first band-pass filter, between the motor rotor and the driving element, the driving element feedback circuitry causing the driving element to generate the driving signal as a function of an amplitude of the motor rotor oscillation for maintaining the amplitude of the motor rotor oscillation within a predetermined range; and
output circuitry, including a second band-pass filter, producing an output signal as a function of the changing capacitance of the motor assembly, the first and second band-pass filters having central frequency phase characteristics not exceeding about 0.1°
/Hz.
1 Assignment
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Accused Products
Abstract
In one embodiment, a micro-gyro device for measuring rotational movement about an input axis includes a driving element generating a driving signal. A MEMS gyro includes a motor rotor and a motor assembly. The motor rotor receives the driving signal and oscillates about a motor axis at a frequency determined as a function of the driving signal. The motor assembly oscillates around a rate axis, which is orthogonal to the motor axis, as a function of the frequency of the motor rotor oscillation. A capacitance of the motor assembly changes as a function of the oscillation of the motor assembly. Driving element feedback circuitry, including a first band-pass filter, is between the motor rotor and the driving element. The driving element feedback circuitry causes the driving element to generate the driving signal as a function of an amplitude of the motor rotor oscillation for maintaining the amplitude of the motor rotor oscillation within a predetermined range. Output circuitry, including a second band-pass filter, produces an output signal as a function of the changing capacitance of the motor assembly. The first and second band-pass filters have central frequency phase characteristics not exceeding about 0.1°/Hz.
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Citations
20 Claims
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1. A micro-gyro device for measuring rotational movement about an input axis, comprising:
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a driving element generating a driving signal; a MEMS gyro including a motor rotor and a motor assembly, the motor rotor receiving the driving signal and oscillating about a motor axis at a frequency determined as a function of the driving signal, the motor assembly oscillating around a rate axis, which is orthogonal to the motor axis, as a function of the frequency of the motor rotor oscillation, a capacitance of the motor assembly changing as a function of the oscillation of the motor assembly; driving element feedback circuitry, including a first band-pass filter, between the motor rotor and the driving element, the driving element feedback circuitry causing the driving element to generate the driving signal as a function of an amplitude of the motor rotor oscillation for maintaining the amplitude of the motor rotor oscillation within a predetermined range; and output circuitry, including a second band-pass filter, producing an output signal as a function of the changing capacitance of the motor assembly, the first and second band-pass filters having central frequency phase characteristics not exceeding about 0.1°
/Hz. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A micro-gyro device for measuring rotational movement about an input axis, comprising:
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a driving element generating a driving signal; a MEMS gyro including a motor rotor and a motor assembly, the motor rotor receiving the driving signal and oscillating about a motor axis at a frequency determined as a function of the driving signal, the motor assembly oscillating around a rate axis, which is orthogonal to the motor axis, as a function of the frequency of the motor rotor oscillation, a capacitance of the motor assembly changing as a function of the oscillation of the motor assembly; driving element feedback circuitry, including a first plurality of cascaded band-pass filters, between the motor rotor and the driving element, the driving element feedback circuitry causing the driving element to generate the driving signal as a function of an amplitude of the motor rotor oscillation for maintaining the amplitude of the motor rotor oscillation within a predetermined range; and output circuitry, including a second plurality of cascaded band-pass filters, producing an output signal as a function of the changing capacitance of the motor assembly, the first and second plurality of band-pass filters having matching phase characteristics. - View Dependent Claims (11, 12, 13, 14, 15, 16)
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17. A method for filtering signals, the method comprising:
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generating a driving signal; creating an oscillation about a motor axis at a frequency determined as a function of the driving signal; creating an oscillation about a rate axis, which is orthogonal to the motor axis, as a function of the frequency of the oscillation about the motor axis; filtering a feedback signal representing the oscillation about the motor axis via a central frequency phase characteristic not exceeding about 0.1°
/Hz;producing an output signal as a function of the oscillation around the rate axis; and filtering the output signal via a central frequency phase characteristic not exceeding about 0.1°
/Hz. - View Dependent Claims (18, 19, 20)
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Specification