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Micro-fabricated devices having a suspended membrane or plate structure

  • US 20080121611A1
  • Filed: 11/27/2006
  • Published: 05/29/2008
  • Est. Priority Date: 11/27/2006
  • Status: Active Grant
First Claim
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1. A micro-fabricated device comprising:

  • a substrate defining a first cavity passing through the substrate, the cavity defining a first opening;

    an intermediate portion disposed over the substrate defining a second opening that is larger in size than the first opening, wherein the dimensions of the second opening are controlled according to a parameter of the device; and

    a membrane positioned adjacent the second opening.

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