SEMICONDUCTOR STRUCTURE AND METHOD OF MAKING SAME
First Claim
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1. A structure, comprising:
- a gate oxide layer formed on a substrate;
a gate formed on the gate oxide layer;
a material about walls of the gate and formed within an undercut underneath the gate to protect regions of the gate oxide layer exposed by the undercut; and
source and drain regions isolated from the gate by the material.
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Abstract
The invention is directed to a structure and method of forming a structure having a sealed gate oxide layer. The structure includes a gate oxide layer formed on a substrate and a gate formed on the gate oxide layer. The structure further includes a material abutting walls of the gate and formed within an undercut underneath the gate to protect regions of the gate oxide layer exposed by the undercut. Source and drain regions are isolated from the gate by the material.
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Citations
21 Claims
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1. A structure, comprising:
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a gate oxide layer formed on a substrate; a gate formed on the gate oxide layer; a material about walls of the gate and formed within an undercut underneath the gate to protect regions of the gate oxide layer exposed by the undercut; and source and drain regions isolated from the gate by the material. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 21)
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9-20. -20. (canceled)
Specification