MICRO-ELECTROMECHANICAL SYSTEM (MEMS) BASED CURRENT & MAGNETIC FIELD SENSOR HAVING IMPROVED SENSITIVITIES
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Accused Products
Abstract
A micro-electromechanical system (MEMS) based current & magnetic field sensor includes a MEMS-based magnetic field sensing component a structural component comprising a silicon substrate and a compliant layer comprising a material selected from the group consisting of silicon dioxide and silicon nitride, a magnetic-to-mechanical converter coupled to the structural component to provide a mechanical indication of the magnetic field, and a strain responsive component coupled to the structural component to sense the mechanical indication and to provide an indication of the current in the current carrying conductor in response thereto.
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Citations
54 Claims
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1-32. -32. (canceled)
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33. A micro-electromechanical system current and magnetic field sensor for sensing a magnetic field produced by a current carrying conductor, comprising:
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a structural component comprising a substrate and a compliant layer; a magnetic-to-mechanical converter coupled to the structural component to provide a mechanical indication of the magnetic field; and a strain responsive component coupled to the structural component to sense the mechanical indication and to provide an indication of the current in the current carrying conductor in response thereto. - View Dependent Claims (34, 35, 36, 37, 38, 39, 40, 41)
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42. A micro-electromechanical system current and magnetic field sensor for sensing a magnetic field produced by a current carrying conductor, comprising:
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a structural component configured to register a bending action and a twisting action responsive to the mechanical indication from the magnetic-to-mechanical converter; a magnetic-to-mechanical converter coupled to the structural component to provide a mechanical indication of the magnetic field; and a strain responsive component coupled to the structural component to sense the mechanical indication and to provide an indication of the current in the current carrying conductor in response thereto. - View Dependent Claims (43, 44, 45, 46, 47, 48, 49, 50)
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51. A micro-electromechanical system current and magnetic field sensor for sensing a magnetic field produced by a current carrying conductor, comprising:
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a structural component comprising a region of low-stress silicon; a magnetic-to-mechanical converter coupled to the structural component to provide a mechanical indication of the magnetic field; and a strain responsive component coupled to the structural component to sense the mechanical indication and to provide an indication of the current in the current carrying conductor in response thereto. - View Dependent Claims (52)
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53. A method for fabricating a micro-electromechanical system magnetic field sensing component comprising:
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providing a substrate including a compliant layer comprising silicon dioxide or silicon nitride; forming a strain responsive component on the substrate; forming a magnetic-to-mechanical converter on the substrate; and removing at least a portion of the substrate to release a spring element formed at least partly by the compliant layer. - View Dependent Claims (54)
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Specification