Projection Optical System, Exposure Equipment and Exposure Method
1 Assignment
0 Petitions
Accused Products
Abstract
A projection optical system is a system with good imaging performance based on well-balanced compensation for aberration associated with image height and aberration associated with numerical aperture, while ensuring a large effective image-side numerical aperture in the presence of a liquid in the optical path between the projection optical system and an image plane. The projection optical system forms an image of a first plane on a second plane. An optical path between an optical member located nearest to the second plane out of optical members with a refractive power in the projection optical system, and the second plane is fillable with a predetermined liquid. The projection optical system satisfies the condition of 0.02<NA×WD/FA<0.08, where NA is a numerical aperture on the second plane side of the projection optical system, WD a distance along the optical axis between an optical member located nearest to the first plane in the projection optical system, and the first plane, and FA a maximum of effective diameters of all optical surfaces in the projection optical system.
13 Citations
61 Claims
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1-20. -20. (canceled)
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21. A projection optical system which forms an image of a first plane on a second plane, comprising:
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a first lens unit disposed in an optical path between the first plane and the second plane; a second lens unit with a positive refractive power disposed subsequently to an image side of the first lens unit; a third lens unit with a negative refractive power disposed subsequently to an image side of the second lens unit; a fourth lens unit with a positive refractive power disposed subsequently to an image side of the third lens unit; and a fifth lens unit with a positive refractive power disposed subsequently to an image side of the fourth lens unit; wherein the first lens unit comprises a first lens of a biconcave shape disposed nearest to the first plane;
a first meniscus lens which is disposed subsequently to the first lens and a concave surface of which is directed toward an object side;
a second meniscus lens which is disposed subsequently to the first meniscus lens and a concave surface of which is directed toward the object side;
a third meniscus lens which is disposed subsequently to the second meniscus lens and a concave surface of which is directed toward the object side; and
a fourth meniscus lens which is disposed subsequently to the third meniscus lens and a concave surface of which is directed toward the object side;wherein the third lens unit comprises a front negative lens which is disposed nearest to the object side in the third lens unit and a concave surface of which is directed toward the image side; and
a rear negative lens which is disposed nearest to the image side in the third lens unit and a concave surface of which is directed toward the object side;wherein an aperture stop is disposed between the fourth lens unit and the fifth lens unit; wherein the fifth lens unit comprises an optical member located nearest to the second plane among optical members with a refractive power in the projection optical system; and wherein an optical path between the optical member located nearest to the second plane in the fifth lens unit, and the second plane is fillable with a predetermined liquid. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42)
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43. A projection optical system which forms an image of a first plane on a second plane,
wherein an optical path between an optical member located nearest to the second plane among optical members with a refractive power in the projection optical system, and the second plane is fillable with a predetermined liquid, the projection optical system satisfying the following condition: -
0.02<
NA×
WD/FA<
0.08,where NA is a numerical aperture on the second plane side of the projection optical system, WD a distance along the optical axis between an optical member located nearest to the first plane in the projection optical system, and the first plane, and FA a maximum of effective diameters of all optical surfaces in the projection optical system. - View Dependent Claims (44, 45, 46, 47, 48, 49, 50, 51, 52)
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53. A projection optical system which forms an image of a first plane on a second plane,
wherein an optical path between an optical member located nearest to the second plane among optical members with a refractive power in the projection optical system, and the second plane is fillable with a predetermined liquid, the projection optical system satisfying the following condition: -
0.2<
NA×
FS/FA<
0.6,where NA is a numerical aperture on the second plane side of the projection optical system, FA a maximum of effective diameters of all optical surfaces in the projection optical system, and FS a smaller effective diameter out of an effective diameter of an optical surface on the first plane side of a negative lens nearest to the first plane in the projection optical system and an effective diameter of an optical surface on the second plane side of the negative lens. - View Dependent Claims (54, 55, 56, 57, 58, 59, 60, 61)
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Specification