Ranged fault signatures for fault diagnosis
First Claim
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1. A method of generating fault signatures, comprising:
- analyzing process data generated during a manufacturing process to detect a fault;
determining one or more process variables of the manufacturing process that contributed to the fault;
determining a relative contribution of each of the one or more process variables to the fault; and
generating a fault signature having relative contribution ranges for at least one of the one or more process variables, the relative contribution ranges based on the determined relative contributions.
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Abstract
Process data is analyzed, the process data having been generated during a manufacturing process to detect a fault. One or more process variables of the manufacturing process that contributed to the fault are determined. A relative contribution of each of the one or more process variables to the fault is determined. A fault signature having relative contribution ranges for at least one of the one or more process variables is generated, the relative contribution ranges based on the determined relative contributions.
63 Citations
22 Claims
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1. A method of generating fault signatures, comprising:
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analyzing process data generated during a manufacturing process to detect a fault; determining one or more process variables of the manufacturing process that contributed to the fault; determining a relative contribution of each of the one or more process variables to the fault; and generating a fault signature having relative contribution ranges for at least one of the one or more process variables, the relative contribution ranges based on the determined relative contributions. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A computer readable storage medium including instructions that, when executed by a processing system, cause the processing system to implement a method of generating fault signatures comprising:
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analyzing process data generated during a manufacturing process to detect a fault; determining one or more process variables of the manufacturing process that contributed to the fault; determining a relative contribution of each of the one or more process variables to the fault; and generating a fault signature having relative contribution ranges for at least one of the one or more process variables, the relative contribution ranges based on the determined relative contributions. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16)
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17. A system for monitoring processes of a manufacturing apparatus, comprising:
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a fault detector to receive process data, and to detect a fault by calculating statistics for the process data, comparing the calculated statistics to corresponding statistics of a multivariate statistical model, and detecting that a model metric of the multivariate statistical model exceeds a control limit based on the comparison; and a fault diagnoser coupled with the fault detector, the fault diagnoser to determine one or more process variables of the manufacturing process that contributed to the fault, determine a relative contribution of each of the one or more process variables to the fault, and generate a fault signature having relative contribution ranges for at least one of the one or more process variables, the relative contribution ranges based on the determined relative contributions. - View Dependent Claims (18, 19, 20, 21)
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22. A method of dividing fault signatures, comprising:
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analyzing process data generated during a manufacturing process to detect a fault; determining one or more process variables that contributed to the fault; determining a relative contribution of each of the one or more process variables; determining a fault signature that matches the fault by comparing relative contributions of each of the one or more process variables to relative contribution ranges of a plurality of fault signatures, a fault signature matching the fault if the relative contributions of the one or more process variables to the fault match relative contribution ranges of the one or more process variables in the fault signature; dividing the determined fault signature into two distinct fault signatures, each of the two distinct fault signatures having a different subset of the fault contribution ranking ranges of the process variables in the determined fault signature; adding a new fault class; and associating the new fault class with one of the distinct fault signatures.
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Specification