METHOD OF METALLIZING A SOLAR CELL SUBSTRATE

• US 20080128019A1
• Filed: 12/01/2006
• Published: 06/05/2008
• Est. Priority Date: 12/01/2006
• Status: Abandoned Application

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: LOPATIN, Sergey, Kovarsky, Nicolay Y., Gay, Charles, Eaglesham, David, Dukovic, John O.
• Application Number:
  US11/566,201
• Publication Number:
  US 20080128019A1
• Time in Patent Office: Days
• US Class Current: 136/252
• CPC Class Codes: C25D 5/022 using masking means
• CPC Class Codes: C25D 5/10 Electroplating with more than one layer of the same or of different metals for bearings C25D7/10
• CPC Class Codes: C25D 7/126 for solar cells
• CPC Class Codes: H01L 31/022425 for solar cells
• CPC Class Codes: Y02E 10/50 Photovoltaic [PV] energy

Abstract

Embodiments of the invention contemplate the formation of a low cost solar cell using a novel high speed electroplating method and apparatus to form a metal contact structure having selectively formed metal lines using an electrochemical plating process. The apparatus and methods described herein remove the need to perform one or more high temperature screen printing processes to form conductive features on the surface of a solar cell substrate. The resistance of interconnects formed in a solar cell device greatly affects the efficiency of the solar cell. It is thus desirable to form a solar cell device that has a low resistance connection that is reliable and cost effective. Therefore, one or more embodiments of the invention described herein are adapted to form a low cost and reliable interconnecting layer using an electrochemical plating process containing a common metal, such as copper.

Claims

1. A method of forming a solar cell device, comprising:

positioning a solar cell substrate in a first processing chamber, the solar cell substrate having a first region and a second region that comprise elements that are used to form a solar cell device;

forming a first conductive layer on the first region and the second region in the first processing chamber; and

forming a second conductive layer on the first conductive layer using an electrochemical plating process, wherein forming the second conductive layer comprises;

forming a first metal layer on at least a portion of the first conductive region; and

forming a second metal layer on at least a portion of the second conductive region.

2. The method of claim 1, wherein the first metal layer and the second metal layer comprises copper.

3. The method of claim 1, further comprising forming a third conductive layer over the first and second metal layers by immersing the first and second metal layers and an electrode in a second electrolyte and biasing the first and second metal layers relative to the electrode using a power supply.

4. The method of claim 3, wherein the second electrolyte contains a metal ion selected from a group consisting of tin, silver, copper, gold, zinc, and lead.

5. The method of claim 1, wherein the second conductive layer is formed on a non-light receiving side of the solar cell substrate and the sum of the surface area of the second conductive layer is greater than 70% of the surface area of the non-light receiving side of the solar cell substrate.

6. The method of claim 1, wherein the second conductive layer is formed on a light receiving side of the substrate and the sum of the surface area of the second conductive layer is less than 30% of the surface area of the light receiving side of the solar cell substrate.

7. The method of claim 1, further comprising removing at least a portion of the first conductive layer from the surface of the substrate to electrically isolate the first region from the second region.

8. The method of claim 1, wherein forming the second conductive layer is performed in a second process chamber.

9. A method of forming a solar cell device, comprising:

positioning a solar cell substrate in a first processing chamber, the solar cell substrate having a first region and a second region that comprise elements that are used to form a solar cell device;

forming a first conductive layer over a portion of the first region and the second region in the first processing chamber; and

forming a second conductive layer over a portion of the first conductive layer using an electrochemical plating process, wherein forming the second conductive layer comprises;

disposing a masking plate having first surface and a plurality of apertures formed therein over at least a portion of the first conductive layer, wherein the plurality of apertures are in communication with a first surface;

contacting the first conductive layer with an electrical contact; and

forming the second conductive layer over the first conductive layer by immersing the substrate and an electrode in a first electrolyte and electrically biasing the electrical contact relative to the electrode, wherein the second metal layer is simultaneously formed within the areas exposed by apertures formed in the masking plate.

10. The method of claim 9, wherein the first electrolyte contains a copper salt selected from a group consisting of copper sulfate, copper chloride, copper acetate, copper pyrophosphate, and copper fluoroborate.

11. The method of claim 9, wherein the first conductive layer comprises copper and at least one element selected from a group consisting of silver, nickel, zinc and tin.

12. The method of claim 9, further comprising forming a third conductive layer over the second conductive layer by immersing the second metal layer and a second electrode in a second electrolyte and biasing the second conductive layer relative to the electrode using a power supply.

13. The method of claim 12, wherein the second electrolyte contains a metal ion selected from a group consisting of tin, silver, copper, gold, zinc, and lead.

14. The method of claim 9, wherein a portion of the second conductive layer is on a non-light receiving side of the substrate and the sum of the cross-sectional areas of the apertures at the first surface of the masking plate is greater than 70% of the surface area of the non-light receiving side of the substrate.

15. The method of claim 9, wherein a portion of the second conductive layer is on a light receiving side of the substrate and the sum of the cross-sectional areas of the apertures at the first surface of the masking plate is less than 30% of the surface area of the light receiving side of the substrate.

16. The method of claim 9, further comprising removing at least a portion of the first conductive layer that does not have the second conductive layer disposed on it from the surface of the substrate.

17. The method of claim 9, wherein forming the second conductive layer is performed in a second process chamber.

18. A method of forming a solar cell device, comprising:

positioning a solar cell substrate in a first processing chamber, the solar cell substrate having a first region and a second region that comprise elements that are used to form a solar cell device;

forming a first conductive layer over a portion of the first region and the second region in the first processing chamber; and

forming a second conductive layer over a portion of the first conductive layer using an electrochemical plating process, wherein forming the second conductive layer comprises;

depositing a masking material over the first conductive layer;

forming a plurality of apertures in the masking layer to expose desired regions of the first conductive layer;

contacting the first conductive layer with an electrical contact; and

forming the second metal layer over the first conductive layer by immersing the substrate and an electrode in a first electrolyte and electrically biasing the electrical contact relative to the electrode.

19. The method of claim 18, wherein the first electrolyte contains a copper salt selected from a group consisting of copper sulfate, copper chloride, copper acetate, copper pyrophosphate, and copper fluoroborate.

20. The method of claim 18, further comprising forming a third conductive layer over the second conductive layer by immersing the second metal layer and a second electrode in a second electrolyte and biasing the second conductive layer relative to the electrode using a power supply.

21. The method of claim 20, wherein the second electrolyte contains a metal ion selected from a group consisting of tin, silver, copper, gold, zinc, and lead.

22. The method of claim 18, wherein a portion of the second conductive layer is on a non-light receiving side of the substrate and the sum of the cross-sectional areas of the apertures is greater than 70% of the surface area of the non-light receiving side of the substrate.

23. The method of claim 18, wherein a portion of the second conductive layer is on a light receiving side of the substrate and the sum of the cross-sectional areas of the apertures is less than 30% of the surface area of the light receiving side of the substrate.

24. The method of claim 18, further comprising removing the masking layer from the surface of the substrate after forming the second conductive layer.

25. The method of claim 18, further comprising removing at least a portion of the first conductive layer that does not have the second conductive layer disposed on it from the surface of the substrate.

26. The method of claim 18, wherein forming the second conductive layer is performed in a second process chamber.