ELECTROCHEMICAL GAS SENSOR CHIP AND METHOD OF MANUFACTURING THE SAME
First Claim
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1. An electrochemical gas sensor chip, comprising:
- a substrate;
an electrode patterned on the substrate;
a solid electrolyte layer having proton conductivity formed on the substrate having the patterned electrode; and
a hydrophobic microporous membrane formed on the solid electrolyte layer.
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Abstract
An electrochemical gas sensor and a method of manufacturing the same are provided. The electrochemical gas sensor includes: a substrate; an electrode patterned on the substrate; a solid electrolyte layer having proton conductivity formed on the substrate having the patterned electrode; and a hydrophobic microporous membrane formed on the solid electrolyte layer. The gas sensor chip is easily integrated with a driving circuit and uses a solid electrolyte layer, and thus it can be manufactured in a smaller size and in a large area process.
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Citations
14 Claims
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1. An electrochemical gas sensor chip, comprising:
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a substrate; an electrode patterned on the substrate; a solid electrolyte layer having proton conductivity formed on the substrate having the patterned electrode; and a hydrophobic microporous membrane formed on the solid electrolyte layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method of manufacturing an electrochemical gas sensor chip, comprising the steps of:
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preparing a substrate; patterning an electrode on the substrate; forming a solid electrolyte layer having proton conductivity on the substrate having the patterned electrode; and forming a hydrophobic microporous membrane on the solid electrolyte layer. - View Dependent Claims (11, 12, 13, 14)
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Specification