APPARATUS AND METHOD FOR INTRODUCING PARTICLES USING A RADIO FREQUENCY QUADRUPOLE LINEAR ACCELERATOR FOR SEMICONDUCTOR MATERIALS

• US 20080128641A1
• Filed: 11/07/2007
• Published: 06/05/2008
• Est. Priority Date: 11/08/2006
• Status: Abandoned Application

• Current Assignee: Silicon Genesis
• Original Assignee: Silicon Genesis
• Inventors: Adibi, Babak, Henley, Francois J., Lamm, Albert
• Application Number:
  US11/936,582
• Publication Number:
  US 20080128641A1
• Time in Patent Office: Days
• US Class Current: 250/492.21
• CPC Class Codes: H01J 2237/04737 radio-frequency quadrupole [RFQ]
• CPC Class Codes: H01J 37/04 Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement electron or ion-optical systems for localised treatment of materials H01J37/3007; discharge control means in gas filled discharge tubes H01J37/32009
• CPC Class Codes: H01J 37/3171 for ion implantation plasma immersion ion implantation H01J37/32412
• CPC Class Codes: H01L 21/26506 in group IV semiconductors
• CPC Class Codes: H01L 21/2658 of a molecular ion, e.g. decaborane
• CPC Class Codes: H01L 21/26593 at a temperature lower than room temperature
• CPC Class Codes: H05H 7/04 Magnet systems , e.g. undulators, wigglers free-electron laser H01S3/0903; Energisation thereof
• CPC Class Codes: H05H 7/10 Arrangements for ejecting particles from orbits
• CPC Class Codes: H05H 9/00 Linear accelerators

Abstract

A system for forming one or more detachable semiconductor films capable of being free-standing. The apparatus includes an ion source to generate a plurality of collimated charged particles at a first energy level. The system includes a linear accelerator having a plurality of modular radio frequency quadrupole (RFQ) elements numbered from 1 through N successively coupled to each other, where N is an integer greater than 1. The linear accelerator controls and accelerates the plurality of collimated charged particles at the first energy level into a beam of charge particles having a second energy level. RFQ element numbered 1 is operably coupled to the ion source. The system includes an exit aperture coupled to RFQ element numbered N of the RFQ linear accelerator. In a specific embodiment, the system includes a beam expander coupled to the exit aperture, the beam expander being configured to process the beam of charged particles at the second energy level into an expanded beam of charged particles. The system includes a process chamber coupled to the beam expander and a workpiece provided within the process chamber to be implanted

Claims

1. An apparatus for providing charged particles for manufacture of one or more detachable semiconductor films capable of being free-standing, the apparatus comprising:

an ion source to generate a plurality of charged particles, the plurality of charged particles being provided as a collimated beam at a first energy level;

an radio frequency quadrupole (RFQ) linear accelerator, the RFQ linear accelerator comprising a plurality of modular radio frequency quadrupole (RFQ) elements numbered from 1 through N, where N is an integer greater than 1, each of the plurality of modular RFQ elements being coupled successively to each other, the RFQ linear accelerator controls and accelerates the beam of charged particles at the first energy level into a beam of charge particles having a second energy level, RFQ element numbered 1 being operably coupled to the ion source;

an exit aperture coupled to RFQ element numbered N of the RFQ linear accelerator;

a beam expander coupled to the exit aperture, the beam expander being configured to process the beam of charged particles at the second energy level into an expanded beam of charged particles;

a process chamber coupled to the beam expander; and

a workpiece provided within the process chamber, the workpiece including a surface region being implanted by the expanded beam of charged particles.

2. The apparatus of claim 1 wherein the ion source is selected from an ECR ion source, a microwave ion source, an ICP ion source, or others.

3. The apparatus of claim 1 wherein the plurality of charged particles generated by the ion source can be selected from H⁻

or H⁺ (proton) or H²⁺ species.

4. The apparatus of claim 1 wherein the ion source is capable of generating an ion beam with an adjustable current up to 30 mA at an energy of about 25 keV.

5. The apparatus of claim 1 wherein the ion source is capable of operating in a continuous mode or a pulsed mode with pulse lengths adjustable from 10 to 100 μ

s and repetition rates adjustable from 10 to 3000 Hz.

6. The apparatus of claim 1 wherein the RFQ element numbered 1 comprises a RFQ linac subsystem with a resonant frequency of about 200 MHz capable of focusing, bunching, and accelerating an ion beam from an energy of 25 keV to an energy of at least 0.75 MeV.

7. The apparatus of claim 1 wherein the accelerated beam exiting the RFQ element numbered N may be a proton beam with a current up to about 30 mA at an energy level ranging from 0.5 to 7 MeV.

8. The apparatus of claim 1 wherein the beam expander is capable of processing the beam with a beam size adjustable from 3 mm or less to about 50 cm using magnetic quadrupole and/or octupole fields.

9. The apparatus of claim 1 wherein the process chamber comprises a tray device to support the workpiece such that at least part of the surface region is irradiated with the beam of charged particles at the second energy level.

10. The apparatus of claim 9 wherein the tray device is configured to move to allow the beam of charged particles to scan across the surface region and to be implanted into the workpiece.

11. The apparatus of claim 1 further comprises a computer control system configured to control the ion source beam current, rf power supply, beam dynamics, implantation and/or cleavage process.

12. A method for introducing charged particles for manufacture of one or more detachable semiconductor films capable of being free-standing for device applications, the method comprising:

generating a beam of charged particles with a beam current at a first energy level using an ion source;

transferring the beam at a first energy level to a beam at a second energy level through a radio frequency quadrupole (RFQ) linear accelerator coupled to the ion source, the RFQ linear accelerator comprising a plurality of modular RFQ elements numbered 1 to N, where N is an integer greater than 1;

processing the beam at the second energy level with a beam expander coupled to the RFQ linear accelerator to expand the beam size capable of implanting the charges particles; and

irradiating the beam at the second energy level into a workpiece through a surface region, the workpiece being mounted in a process chamber coupled to the beam expander in such a way that the beam at the second energy level with a certain beam size can scan across the surface region and create a cleave region with an averaged implantation dose at a depth of greater than about 50 microns from the surface region of the workpiece.

13. The method of claim 12 wherein the second energy level is between about 0.5 and 7 MeV.

14. The method of claim 12 wherein the beam of charged particles comprises hydrogen ions.

15. The method of claim 12 wherein irradiating the beam comprises changing a position of the beam on the workpiece by scanning the beam or translating the workpiece.

16. A system comprising:

an ion source configured to output a low energy ion beam;

a low energy beam transport (LEBT) section configured to focus the low energy ion beam received from the ion source;

a linear accelerator configured to convert the focused low energy ion beam into a high energy ion beam;

a high energy beam transport (HEBT) section configured to receive the high energy ion beam; and

an end station configured to support a bulk material such that a surface of the bulk material is exposed to the high energy ion beam.

17. The system of claim 16 wherein:

the ion source comprises an electron cyclotron resonance (ECR) or microwave source of the beam comprising hydrogen ions;

the LEBT section comprises an Einzel lens or a solenoid lens;

the linear accelerator comprises a series of successive radio frequency quadrupole (RFQ) stages configured to accelerate the beam of hydrogen ions to an energy of between about 0.5-7 MeV;

the HEBT section comprises a scanning device; and

the end station is configured to support a plurality of bulk materials on a common tray.

18. The system of claim 16 wherein the HEBT section comprises a device configured to scan the beam across one of the plurality of bulk materials.

19. The system of claim 18 wherein the scanning device comprises electrostatic or magnetic elements.

20. The system of claim 18 wherein the scanning device is configured to cause the scanned high energy beam to impinge the bulk material surface at an angle of less than about 4 degrees from normal.

21. The system of claim 16 wherein the end station is configured to physically translate the bulk material along at least one axis during exposure to the ion beam.

22. The system of claim 16 wherein the HEBT section further comprises a beam expander.

23. The system of claim 16 wherein the linear accelerator comprises RFQ, QFI, RFI, and/or DTL elements.

24. A method of fabricating a free standing film from a bulk material, the method comprising:

exposing a surface of the bulk material to a high energy beam of ions generated by an ECR ion source coupled to a RFQ linear accelerator, such that hydrogen ions from the beam are implanted to a depth of about 20 microns or greater into the bulk material; and

cleaving the free-standing film from the bulk material at the depth.

25. The method of claim 24 wherein the beam has an energy of between about 0.5 and 7 MeV.

26. The method of claim 24 further comprising scanning the high energy beam across the surface of the bulk material.

27. The method of claim 24 further comprising translating the bulk material along at least one axis during the exposing.

28. An apparatus comprising:

an ECR ion source;

a low energy beam transport (LEBT) section comprising an Einzel lens and having an inlet in vacuum communication with the ECR ion source;

a linear accelerator section comprising three successive RFQ stages to elevate a beam of hydrogen ions outlet from the LEBT section to an energy of between about 0.5 and 7 MeV;

a high energy beam transport (HEBT) section in vacuum communication with an outlet of the linear accelerator section, the HEBT section comprising a beam scanner; and

an end station configured to translate a surface of a bulk material along an axis while the surface is exposed to the scanned high energy beam.