×

METHOD OF FABRICATING THIN FILM TRANSISTOR HAVING MULTILAYER STRUCTURE AND ACTIVE MATRIX DISPLAY DEVICE INCLUDING THE THIN FILM TRANSISTOR

  • US 20080135837A1
  • Filed: 10/11/2007
  • Published: 06/12/2008
  • Est. Priority Date: 12/07/2006
  • Status: Active Grant
First Claim
Patent Images

1. A method of fabricating a thin film transistor, comprising:

  • preparing a substrate formed of plastic;

    forming a buffer insulating layer on the plastic substrate;

    forming a silicon layer on the buffer insulating layer;

    patterning the silicon layer to form an active layer;

    forming a gate insulating layer on the active layer;

    stacking a plurality of gate metal layers on the gate insulating layer;

    patterning the plurality of gate metal layers; and

    etching a corner region of the lowest gate metal layer formed on the gate insulating layer of the patterned gate metal layers.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×