Nitride Semiconductor Light Emitting Element and Method for Manufacturing the Same
First Claim
1. A nitride semiconductor light emitting element comprising a laminate made of nitride semiconductor layers, the laminate including:
- one light emitting part having a laminate structure of a first n-type layer, a p-type layer and an active layer sandwiched between them, anda second n-type layer present at the outer side of the light emitting part and at the p-type layer side, whereinthe second n-type layer has a surface exposed by dry etching, and a p-side electrode for injecting a hole into the p-type layer of said light emitting part is formed on the exposed surface, the p-side electrode being formed by using a material selected from the group consisting of Al, Ti, W, Cr and ITO, andwherein the laminate is formed by sequentially growing nitride semiconductor layers on the substrate,when the substrate is on the lower side, the light emitting part is included in the laminate in such a manner that the first n-type layer is on the lower side and the p-type layer is on the upper side, andthe second n-type layer is located at the upper side of the light emitting part.
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Abstract
In an element structure of a nitride semiconductor light emitting element, the laminate including a light emitting part having a laminate structure of a first n-type layer 13, a p-type clad layer 15 and an active layer 14 sandwiched between them, and a second n-type layer 16 present at the outer side of the light emitting part and at the p-type clad layer side. When the laminate is to be grown on a substrate 11, the light emitting part has the p-type clad layer 15 placed on the upper side of the second n-type layer 16 is placed on the further upper side of the light emitting part. The second n-type layer 16 is dry-etched to form an exposed surface. An electrode P12 is formed on the surface exposed by dry etching, whereby the electrode P12 becomes a p-side electrode having a low contact resistance, which is used for injecting a hole in the p-type clad layer 15 of the aforementioned light emitting part, even if the electrode P12 is formed in the n-type layer 16.
47 Citations
21 Claims
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1. A nitride semiconductor light emitting element comprising a laminate made of nitride semiconductor layers, the laminate including:
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one light emitting part having a laminate structure of a first n-type layer, a p-type layer and an active layer sandwiched between them, and a second n-type layer present at the outer side of the light emitting part and at the p-type layer side, wherein the second n-type layer has a surface exposed by dry etching, and a p-side electrode for injecting a hole into the p-type layer of said light emitting part is formed on the exposed surface, the p-side electrode being formed by using a material selected from the group consisting of Al, Ti, W, Cr and ITO, and wherein the laminate is formed by sequentially growing nitride semiconductor layers on the substrate, when the substrate is on the lower side, the light emitting part is included in the laminate in such a manner that the first n-type layer is on the lower side and the p-type layer is on the upper side, and the second n-type layer is located at the upper side of the light emitting part. - View Dependent Claims (6, 7, 9, 10, 11, 13, 16, 18, 19, 20, 21)
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2-5. -5. (canceled)
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8. (canceled)
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12. (canceled)
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14. A method for producing a nitride semiconductor light emitting element comprising an element structure wherein a laminate including one light emitting part having nitride semiconductor layers is grown on a substrate, which comprises at least
a step of growing a first n-type layer, an active layer, a p-type layer and a second n-type layer in this order on the substrate, a step of applying dry etching to the upper surface of said second n-type layer, and a step of forming a p-side electrode on the surface of the second n-type layer which has been exposed by dry etching in said step, the electrode being used for injecting a hole into the p-type layer of the light emitting part, the p-side electrode being formed by using a material selected from the group consisting of Al, Ti, W, Cr and ITO, and wherein the laminate is formed by sequentially growing nitride semiconductor layers on the substrate, when the substrate is on the lower side, the light emitting part is included in the laminate in such a manner that the first n-type layer is on the lower side and the p-type layer is on the upper side, and the second n-type layer is located at the upper side of the light emitting part.
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15. (canceled)
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17. (canceled)
Specification