Electromagnetic composite metamaterial

• US 20080136563A1
• Filed: 06/29/2007
• Published: 06/12/2008
• Est. Priority Date: 06/30/2006
• Status: Active Grant

• Current Assignee: Charles Stark Draper Laboratory Incorporated
• Original Assignee: Charles Stark Draper Laboratory Incorporated
• Inventors: Varsanik, Jonathan S., Duwel, Amy E.
• Granted Patent: US 7,741,933 B2
• Time in Patent Office: Days
• US Class Current: 333/186
• CPC Class Codes: H03H 2009/02496 Horizontal, i.e. parallel to the substrate plane
• CPC Class Codes: H03H 2009/02503 Breath-like, e.g. Lam? mode, wine-glass mode
• CPC Class Codes: H03H 2009/02511 Vertical, i.e. perpendicular to the substrate plane
• CPC Class Codes: H03H 2009/02519 Torsional
• CPC Class Codes: H03H 9/0095 using bulk acoustic wave devices
• CPC Class Codes: H03H 9/02393 Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor
• CPC Class Codes: H03H 9/171 implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
• CPC Class Codes: H03H 9/2405 of microelectro-mechanical resonators
• CPC Class Codes: H03H 9/2436 Disk resonators
• CPC Class Codes: H03H 9/2457 Clamped-free beam resonators
• CPC Class Codes: H03H 9/2473 Double-Ended Tuning Fork [DETF] resonators
• CPC Class Codes: H03H 9/462 Microelectro-mechanical filters
• CPC Class Codes: H03H 9/60 Electric coupling means therefor H03H9/0095 takes precedence

Abstract

An electromagnetic composite metamaterial including an electromagnetic medium and a plurality of spaced electromechanical resonators disposed in or on the electromagnetic medium configured to control electromagnetic wave propagation properties in the electromagnetic composite metamaterial.

Claims

1. An electromagnetic composite metamaterial comprising:

an electromagnetic medium; and

a plurality of spaced electromechanical resonators disposed in or on the electromagnetic medium configured to control electromagnetic wave propagation properties in the electromagnetic composite metamaterial.

2. The electromagnetic metamaterial of claim 1 in which the plurality of spaced electromechanical resonators in or on the electromagnetic medium control electromagnetic wave propagation properties chosen from the group consisting of:

velocity, index of refraction, wavelength, direction, dispersion, phase shift, and impedance.

3. The electromagnetic metamaterial of claim 1 in which the electromagnetic medium includes a medium chosen from the group consisting of:

a solid material, a liquid, and a gas.

4. The electromagnetic metamaterial of claim 1 in which one or more of the plurality of spaced electromechanical resonator includes at least one MEMS piezoelectric resonator.

11. The electromagnetic metamaterial of claim 4 in which the at least one MEMS piezoelectric resonator includes a piezoelectric resonator chosen from the group consisting of:

a surface acoustic wave piezoelectric resonator, a contour mode piezoelectric resonator, a thickness mode piezoelectric resonator, a shear mode piezoelectric resonator, and a Lame mode piezoelectric resonator.

12. The electromagnetic metamaterial of claim 1 in which the plurality of spaced electromechanical resonators are disposed in or on the electromagnetic medium in a lattice network arrangement.

13. The electromagnetic metamaterial of claim 1 in which the plurality of spaced electromechanical resonators are configured in one dimension in or on the electromagnetic medium.

14. The electromagnetic metamaterial of claim 1 in which the plurality of spaced electromechanical resonators are configured in two dimensions in or on the electromagnetic medium.

15. The electromagnetic metamaterial of claim 1 in which the plurality of spaced electromechanical resonators are configured in three dimensions in or on the electromagnetic medium.

16. The electromagnetic metamaterial of claim 1 in which the plurality of spaced electromechanical resonators are disposed in the electromagnetic medium.

17. The electromagnetic metamaterial of claim 1 in which the plurality of spaced electromechanical resonators are disposed on the electromagnetic medium.

18. The electromagnetic metamaterial of claim 1 in which the plurality of spaced electromagnetic resonators are disposed at an interface between one or more electromagnetic media.

19. The electromagnetic metamaterial of claim 1 in which the electromagnetic composite metamaterial is configured as an antenna.

20. The electromagnetic metamaterial of claim 1 in which the electromagnetic composite metamaterial is configured as a phase shifter.

21. The electromagnetic metamaterial of claim 1 in which electromagnetic composite metamaterial is configured as a delay element.

22. The electromagnetic metamaterial of claim 1 in which the electromagnetic composite metamaterial is configured as a beam focusing device.

23. The electromagnetic metamaterial of claim 1 in which the electromagnetic composite metamaterial is configured as a beam steering device.

24. The electromagnetic metamaterial of claim 1 in which the electromagnetic composite metamaterial is configured as a frequency selective surface.

25. The electromagnetic metamaterial of claim 1 in which the electromagnetic composite metamaterial is configured as an invisibility material.

26. The electromagnetic metamaterial of claim 1 in which the electromagnetic composite metamaterial is configured as a len.

5. The electromagnetic metamaterial of claim 5 in which one or more of the plurality of spaced electromechanical resonators includes at least one MEMS frequency tunable electromechanical resonator.

6. The electromagnetic metamaterial of claim 5 in which the operating frequency of the at least one MEMS frequency tunable electromagnetic resonators is adjustable to change the electromagnetic wave propagation properties in metamaterial by applying at least one of electrostatic voltages, magnetic forces, thermal actuation, chemical actuation, and light induction.

7. The electromagnetic metamaterial of claim 5 in which the at least one MEMS frequency tunable electromagnetic resonator includes at least one cantilever electromechanical resonator.

8. The electromagnetic metamaterial of claim 5 in which the at least one MEMS frequency tunable electromechanical resonator includes at least one paddle electromechanical resonator.

9. The electromagnetic metamaterial of claim 5 in which the at least one MEMS frequency tunable electromechanical resonators include at least one tuning fork electromechanical resonator.

10. The electromagnetic metamaterial of claim 5 in which the at least one MEMS frequency tunable electromechanical resonator includes at least one disk electromechanical resonator.

27. An electromagnetic composite metamaterial comprising:

an electromagnetic medium; and

a plurality of spaced MEMS resonators disposed in or on the electromagnetic medium configured to control electromagnetic wave propagation properties in the electromagnetic composite metamaterial.

28. An electromagnetic composite metamaterial comprising:

an electromagnetic medium; and

a plurality of spaced electromechanical resonators having an electromagnetic wave traveling therein disposed in or on the electromagnetic medium configured to control propagation properties of the electromagnetic wave in the electromagnetic composite metamaterial.

29. An electromagnetic composite metamaterial comprising:

an electromagnetic medium; and

a plurality of spaced MEMS piezoelectric electromechanical resonators having an electromagnetic wave traveling therein disposed in or on the electromagnetic medium configured to control propagation properties of the electromagnetic wave in the electromagnetic composite metamaterial.

30. An electromagnetic composite metamaterial comprising:

an electromagnetic medium; and

a plurality of spaced MEMS frequency tunable electromechanical resonators having an electromagnetic wave traveling therein disposed in or on the electromagnetic medium configured to control propagation properties of the electromagnetic wave in the electromagnetic composite metamaterial.

31. An electromagnetic composite metamaterial comprising:

an electromagnetic medium; and

a plurality of spaced MEMS cantilever electromechanical resonators having an electromagnetic wave traveling therein disposed in or on the electromagnetic medium configured to control propagation properties of the electromagnetic wave in the electromagnetic composite metamaterial.

32. An electromagnetic composite metamaterial comprising:

an electromagnetic medium; and

a plurality of spaced MEMS paddle electromechanical resonators having an electromagnetic wave traveling therein disposed in or on the electromagnetic medium configured to control propagation properties of the electromagnetic wave in the electromagnetic composite metamaterial.

33. An electromagnetic composite metamaterial comprising:

an electromagnetic medium; and

a plurality of spaced MEMS tuning fork electromechanical resonators having an electromagnetic wave traveling therein disposed in or on the electromagnetic medium configured to control propagation properties of the electromagnetic wave in the electromagnetic composite metamaterial.

34. An electromagnetic composite metamaterial comprising:

an electromagnetic medium; and

a plurality of spaced MEMS disk electromechanical resonators having an electromagnetic wave traveling therein disposed in or on the electromagnetic medium configured to control propagation properties of the electromagnetic wave in the electromagnetic composite metamaterial.