Apparatus and Method for Obtaining Surface Texture Information

• US 20080137101A1
• Filed: 11/03/2005
• Published: 06/12/2008
• Est. Priority Date: 11/03/2004
• Status: Abandoned Application

• Current Assignee: Heriot-Watt University
• Original Assignee: Heriot-Watt University
• Inventors: Chantler, Michael J., Spence, Andrew Desmond
• Application Number:
  US11/666,190
• Publication Number:
  US 20080137101A1
• Time in Patent Office: Days
• US Class Current: 356/611
• CPC Class Codes: G01N 21/8851 Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges G01N21/8806 and G01N21/93 - G01N21/95692 take precedence; optical measurement of dimensions G01B11/00; optical scanning G02B26/10; image transformation G06T3/00; computerised image enhancement G06T5/00; image processing per se for flaw detection G06T7/0002
• CPC Class Codes: G01N 21/956 Inspecting patterns on the surface of objects contactless testing of electronic circuits G01R31/308; testing currency G07D; manufacturing processes per se of semiconductor devices implementing a measuring step H01L22/10
• CPC Class Codes: G06T 7/30 Determination of transform parameters for the alignment of images, i.e. image registration
• CPC Class Codes: G06T 7/586 from multiple light sources, e.g. photometric stereo

Abstract

An apparatus and method for obtaining surface texture information using photometric stereo. The material for which surface height and reflectance function information is desired (“the material”) is illuminated with an illumination source emitting electromagnetic waves, preferably in the form of white light, which is consequently reflected by the material to be scanned into an imaging sensor. The position and orientation of the illumination source relative to the sensor is constant. The material is placed within or on top of a holding apparatus, such as a pane of glass, which is oriented in order to keep the illumination vector constant with respect to the imaged surface. The illumination source and sensor are moved in unison across the surface in order to progressively capture a complete image of the surface; this operation may be facilitated in practice through the use of hardware such as a flatbed scanner.

Claims

1. An apparatus for obtaining surface texture information, the apparatus comprising:

an illumination source for illuminating a sample space and an imaging sensor for capturing images of the sample space;

wherein the effective position of the illumination source and the image sensor with respect to a sample space is substantially constant and the sample space is configured to allow the orientation of a sample with respect to the illumination source to be altered; and

a processor for processing the captured images to allow surface texture information to be obtained from the sample.

2. The apparatus of claim 1, wherein the illumination source and imaging sensor are mounted for movement across the sample space.

3. The apparatus of claim 2, wherein the illumination source and imaging sensor are mounted to scan the sample space.

4. The apparatus of claim 1, wherein the sample space comprises a transparent sample support plate positioned in the line of sight of the illumination source and imaging sensor.

5. The apparatus of claim 1, wherein the illumination source, image sensor, and sample space comprise a flatbed scanner.

6. The apparatus of claim 1, wherein the imaging sensor and illumination source are fixed in position with respect to the sample space.

7. The apparatus of claim 6, wherein the imaging sensor and illumination source are positioned such that a whole image is captured at once.

8. The apparatus of claim 1, wherein the sample space is rotatably mounted.

9. The apparatus of claim 8, wherein a degree of rotation of the sample space is measurable.

10. The apparatus of claim 1, wherein the processor is adapted to:

receive n unregistered images;

define a reference image;

register unregistered floating images by obtaining a transformation for transforming at least some of (n−

1) floating images to spatially align them with the reference image; and

performing a photometric stereo technique to produce sample texture information.

11. The apparatus of claim 10, wherein registering the images occurs prior to the application of the photometric stereo technique.

12. The apparatus of claim 10, wherein registering the images occurs substantially simultaneously with the application of the photometric stereo technique.

13. The apparatus of claim 10, wherein obtaining a transformation to be applied to a floating image comprises estimating the transformation to be applied to the floating image.

14. The apparatus of claim 10, wherein obtaining a transformation to be applied to a floating image comprises optimising the transformation.

15. The apparatus of claim 14, wherein optimising the transformation comprises calculating an error and adjusting the transformation so as to minimise the error.

16. The apparatus of claim 14, wherein optimising the transformation comprises generating an estimated reference image.

17. The apparatus of claim 14, wherein generating an estimated reference image uses scaled surface normals.

18. The apparatus of claim 10, wherein at least one of the n unregistered images comprises an image of the entire sample.

19. The apparatus of claim 10, wherein at least one of the n unregistered images comprise a section of the sample.

20. The apparatus of claim 19, wherein the section of the surface comprises a frame section.

21. The apparatus of claim 20, wherein the frame section is w pixels in width.

22. The apparatus of claim 10, wherein registering the image further comprises:

defining common reference points on each of the images; and

providing an estimated transformation for the image by calculating the transformation applicable to the reference points.

23. The apparatus of claim 22, wherein the common reference points comprise a plurality of registration marks.

24. The apparatus of claim 22, wherein the common reference points comprise edges in the sample.

25. The apparatus of claim 22, wherein the common reference points are defined by the background sample space adjacent to the sample.

26. The apparatus of claim 22, wherein the common reference points comprise areas of the sample which may be of distinctive hue or determined by user input.

27. The apparatus of claim 10, wherein the step of registering the images comprises determining the angle of rotation to spatially align the images.

28. A method of obtaining surface texture information, the method comprising the steps of:

receiving n unregistered images;

defining a reference image;

registering unregistered floating images by obtaining a transformation for transforming at least some of (n−

1) floating images to spatially align them with the reference image; and

performing a photometric stereo technique to produce sample texture information.

29. The method of claim 28, wherein the step of registering the images occurs prior to the application of the photometric stereo technique.

30. The method of claim 28, wherein the step at registering the images occurs substantially simultaneously with the application of the photometric stereo technique.

31. The method of claim 28, wherein the step of obtaining a transformation to be applied to a floating image comprises estimating the transformation to be applied to the floating image.

32. The method of claim 28, wherein the step of obtaining a transformation to be applied to a floating image comprises optimising the transformation.

33. The method claim 32, wherein the step of optimising the transformation comprises:

calculating an error; and

adjusting the transformation so as to minimise the error.

34. The method of claim 32, wherein the step of optimising the transformation comprises generating an estimated reference image.

35. The method of claim 32, wherein the step of generating an estimated reference image uses scaled surface normals.

36. The method of claim 28, wherein at least one of the n unregistered images comprise an image of the entire sample.

37. The method of claim 28, wherein at least one of the n unregistered images comprise a section of the sample.

38. The method of claim 37, wherein the section of the surface comprises a frame section.

39. The method of claim 38, wherein the frame section is w pixels in width.

40. The method of claim 28, wherein the step of registering the image further comprises:

defining common reference points on each of the images; and

providing an estimated transformation for the image by calculating the transformation applicable to the reference points.

41. The method of claim 40, wherein the common reference points comprise a plurality of registration marks.

42. The method of claim 40, wherein the common reference points comprise edges in the sample.

43. The method of claim 40, wherein the common reference points are defined by the background sample space adjacent to the sample.

44. The method of claim 40, wherein the common reference points are areas of the sample which may be of distinctive hue or determined by user input.

45. The method of claim 28, wherein the step of registering the images comprises determining the angle of rotation to spatially align the images.

46. A computer program comprising process instructions for causing computing means to perform the method of claim 28.

47. The computer program of claim 46, wherein the computer program is stored on a record medium.

48. The computer program of claim 46, wherein the computer program is stored in computer memory.

49. A scanner adapted to run computer software to cause the scanner to perform the method of claim 28.

50. The scanner of claim 49, wherein the scanner is a flatbed scanner.