MICROMIRROR DEVICE WITH A HYBRID ACTUATOR
First Claim
1. A MEMs micro-mirror device comprising:
- a substrate;
a mirrored platform pivotally mounted above the substrate for rotation about a longitudinal first axis and a lateral second axes;
a first hinge enabling the mirrored platform to rotate about the first axis;
a second hinge enabling the mirrored platform to rotate about the second axis;
a first electro-static plate electrode mounted on the substrate on one side of the first axis;
a second electro-static plate electrode mounted on an underside of the mirrored platform above the first electro-static plate electrode for attracting the first electro-static plate electrode and rotating the mirrored platform about the first axis;
a stator comb actuator extending longitudinally to the mirrored platform from the substrate; and
a rotor comb actuator, for interleaving with the stator comb actuator, extending from the mirrored platform for rotating the mirrored platform about the second axis.
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Accused Products
Abstract
A hybrid electro-static actuator for rotating a two-dimensional micro-electro-mechanical micro-mirror device about two perpendicular axes includes a vertical comb drive for rotating the micro-mirror about a tilt axis, and a parallel plate drive for rotating the micro-mirror about a roll axis. The rotor comb fingers of the comb drive extend from a sub-frame of the micro-mirror, which is only rotatable about the tilt axis, while one of the parallel plate electrodes is mounted on the underside of a main platform, which generally surrounds the sub-frame. The vertical comb drive rotates both the sub-frame and the main platform about the tilt axis, while the parallel plate drive only rotates the main platform about the roll axis.
15 Citations
18 Claims
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1. A MEMs micro-mirror device comprising:
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a substrate; a mirrored platform pivotally mounted above the substrate for rotation about a longitudinal first axis and a lateral second axes; a first hinge enabling the mirrored platform to rotate about the first axis; a second hinge enabling the mirrored platform to rotate about the second axis; a first electro-static plate electrode mounted on the substrate on one side of the first axis; a second electro-static plate electrode mounted on an underside of the mirrored platform above the first electro-static plate electrode for attracting the first electro-static plate electrode and rotating the mirrored platform about the first axis; a stator comb actuator extending longitudinally to the mirrored platform from the substrate; and a rotor comb actuator, for interleaving with the stator comb actuator, extending from the mirrored platform for rotating the mirrored platform about the second axis. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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Specification