High throughput wafer notch aligner
First Claim
1. An alignment and buffering apparatus for determining an orientation of a plurality of workpieces, the alignment mechanism comprising:
- a base;
a workpiece buffering device comprising a plurality of workpiece tray stations aligned generally vertically with respect to one another, wherein each workpiece tray station is operable to selectively support a respective one of the plurality of workpieces in a respective buffer position;
an elevator device operably coupled to the base, wherein the elevator device is operable to individually vertically translate each of the plurality of workpieces from the respective buffer position to a characterization position and to rotate each respective workpiece about an axis associated therewith; and
a characterization device associated with the characterization position, wherein the characterization device is operable to detect one or more characteristics associated with each of the plurality of workpieces when each respective workpiece is at the characterization position.
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Accused Products
Abstract
An ion implantation apparatus, system, and method are provided for a transferring a plurality of workpieces between vacuum and atmospheric pressures, wherein an alignment mechanism is operable to align a plurality of workpieces for generally simultaneous transportation to a dual-workpiece load lock chamber. The alignment mechanism comprises a characterization device, an elevator, and two vertically-aligned workpiece supports for supporting two workpieces. First and second atmospheric robots are configured to generally simultaneously transfer two workpieces at a time between load lock modules, the alignment mechanism, and a FOUP. Third and fourth vacuum robots are configured to transfer one workpiece at a time between the load lock modules and a process module.
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Citations
40 Claims
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1. An alignment and buffering apparatus for determining an orientation of a plurality of workpieces, the alignment mechanism comprising:
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a base; a workpiece buffering device comprising a plurality of workpiece tray stations aligned generally vertically with respect to one another, wherein each workpiece tray station is operable to selectively support a respective one of the plurality of workpieces in a respective buffer position; an elevator device operably coupled to the base, wherein the elevator device is operable to individually vertically translate each of the plurality of workpieces from the respective buffer position to a characterization position and to rotate each respective workpiece about an axis associated therewith; and a characterization device associated with the characterization position, wherein the characterization device is operable to detect one or more characteristics associated with each of the plurality of workpieces when each respective workpiece is at the characterization position. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. An alignment and buffering apparatus, comprising:
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a base; a first workpiece tray station configured to selectively support a first workpiece, therein defining a first buffer position; a second workpiece tray station configured to selectively support a second workpiece, therein defining a second buffer position, wherein the first buffer position and second buffer position are generally aligned vertically; and an elevator device operably coupled to the base, wherein the elevator device is configured to selectively translate each of the first workpiece and second workpiece along an axis between the respective first buffer position and second buffer position and a characterization position. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28)
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29. A method for aligning and buffering workpieces, the method comprising:
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providing an alignment mechanism having first workpiece tray station, a second workpiece tray station, and a vertically-translating elevator device, wherein the first workpiece tray station is aligned generally vertically beneath the second workpiece tray station, and wherein each of the first and second workpiece tray stations comprise a plurality of workpiece supports; generally concurrently placing first and second workpieces on the plurality of workpiece supports associated with the respective first and second workpiece tray stations; raising the first workpiece from the plurality of workpiece supports of the first workpiece tray station via the elevator device; vertically translating the first workpiece to a characterization position via the elevator device; characterizing the first workpiece; removing the first workpiece from the alignment mechanism; raising the second workpiece from the plurality of workpiece supports of the second workpiece tray station via the elevator device; vertically translating the second workpiece to the characterization position; characterizing the second workpiece; and removing the second workpiece from the alignment mechanism. - View Dependent Claims (30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40)
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Specification