NANO-FIBER ARRAYED SURFACES
First Claim
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1. An apparatus, comprising:
- a substrate comprising a surface; and
a plurality of nano-fibers partially embedded in the surface such that a portion of the embedded nano-fibers extend above the surface, wherein the nano-fibers are arranged such that their longitudinal dimension is substantially parallel to the surface.
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Abstract
Surfaces are provided comprising an array of partially embedded nano-fibers. Two such surfaces may contact each other such that the respective nano-fibers contact at orthogonal angles, resulting in ultra-low friction and ultra-low adhesion contact. Such configurations are useful in several NEMS or MEMS applications, as well as macro-sized applications. Alternatively, the surfaces may contact each other such that the respective nano-fibers are parallel. These configurations are useful in micro-stage or high-order three- dimensional self assembly applications.
30 Citations
45 Claims
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1. An apparatus, comprising:
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a substrate comprising a surface; and a plurality of nano-fibers partially embedded in the surface such that a portion of the embedded nano-fibers extend above the surface, wherein the nano-fibers are arranged such that their longitudinal dimension is substantially parallel to the surface. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A system, comprising:
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a first member having a first surface, wherein a first set of nano-fibers are partially embedded in the first surface such that a portion of the first set of nano-fibers extend above the first surface, wherein the first set of nano-fibers are arranged such that their longitudinal dimension is substantially parallel to the first surface; and a second member having a second surface, wherein a second set of nano-fibers are partially embedded in the second surface such that a portion of the second set of nano-fibers extend above the second surface, wherein the second set of nano-fibers are arranged such that their longitudinal dimension is substantially parallel to the second surface. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22, 23, 24)
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25. A nano-electromechanical system (NEMS) or micro-electromechanical system (MEMS), comprising:
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a first member configured to move from a first position to a second position upon application of an electric field, the first member comprising a first surface, wherein a first set of nano-fibers are partially embedded in the first surface such that a portion of the first set of nano-fibers extend above the first surface, wherein the first set of nano-fibers are arranged such that their longitudinal dimension is substantially parallel to the first surface and to each other; and a second member comprising a second surface, wherein a second set of nano-fibers are partially embedded in the second surface such that a portion of the second set of nano-fibers extend above the second surface, wherein the second set of nano-fibers are arranged such that their longitudinal dimension is substantially parallel to the second surface and to each other, wherein when the first member is in said second position, the first set of nano-fibers contact the second set of nano-fibers at an angle. - View Dependent Claims (26, 27, 28, 29)
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30. A self-assembled structure, comprising a plurality of three-dimensional members, each member comprising at least one surface comprising a plurality of nano-fibers partially embedded therein such that a portion of the nano-fibers extend above the surface in which they are embedded, wherein the nano-fibers are arranged such that their longitudinal dimension is substantially parallel to the surface in which they are embedded and substantially parallel to other nano-fibers embedded in the same surface, wherein at least one nano-fiber-embedded surface contacts another nano-fiber-embedded surface such that the respective nano-fibers are substantially parallel to each other.
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31. A method of moving an object across a first surface, the method comprising:
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placing a first substrate on the first surface, wherein the first substrate comprises a second surface facing away from the first surface, wherein a first set of nano-fibers are partially embedded in the second surface such that a portion of the first set of nano-fibers extend above the second surface, wherein the first set of nano-fibers are arranged such that their longitudinal dimension is substantially parallel to the second surface and to each other; placing a second substrate on the first substrate, wherein the first substrate comprises a third surface facing towards the second surface and a fourth surface facing away from the first and second surfaces, wherein a second set of nano-fibers are partially embedded in the third surface such that a portion of the second set of nano-fibers extend above the third surface, wherein the second set of nano-fibers are arranged such that their longitudinal dimension is substantially parallel to the third surface and to each other, wherein the second set of nano-fibers contact the first set of nano-fibers at an angle; placing the object on the fourth surface; and moving the second substrate laterally relative to the first substrate.
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- 32. A method of manufacturing a low-friction surface, the method comprising placing a plurality of nano-fibers in a corresponding plurality of trenches formed in a surface.
Specification