Method for robust statistical semiconductor device modeling
First Claim
1. A method for robust statistical semiconductor device modeling, said method comprising the steps of:
- building a semiconductor device model using at least one new device parameter variation;
constructing a variation library for said semiconductor device model;
verifying said variation library against measured data from a physical semiconductor device.
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Accused Products
Abstract
According to one exemplary embodiment, a method for robust statistical semiconductor device modeling includes building a semiconductor device model using at least one new device parameter variation, constructing a variation library for the semiconductor device model, and verifying the variation library against measured data from physical semiconductor devices. The variation library is constructed by determining variations of the at least one new device parameter variation and standard device parameters as functions of, for example, sizes and locations of semiconductor devices on semiconductor dies.
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Citations
20 Claims
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1. A method for robust statistical semiconductor device modeling, said method comprising the steps of:
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building a semiconductor device model using at least one new device parameter variation; constructing a variation library for said semiconductor device model; verifying said variation library against measured data from a physical semiconductor device. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A computer programmed with code to execute a method for robust statistical semiconductor device modeling, said method comprising the steps of:
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building a semiconductor device model using at least one new device parameter variation; constructing a variation library for said semiconductor device model; verifying said variation library against measured data from a physical semiconductor device. - View Dependent Claims (17)
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18. A system for obtaining a set of measured data from a wafer under test, said wafer under test including a physical semiconductor device, said set of measured data being utilized to implement a method for robust statistical semiconductor device modeling, said method comprising the steps of:
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building a semiconductor device model using at least one new device parameter variation; constructing a variation library for said semiconductor device model; verifying said variation library against measured data from said physical semiconductor device. - View Dependent Claims (19, 20)
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Specification