MEMS switches with deforming membranes
First Claim
Patent Images
1. A microelectromechanical systems (MEMS) switch comprising:
- at least first and second terminals;
a contact conductor that electrically connects at least a pair of said terminals when said switch is closed;
a first electrode; and
a moveable element having at least a portion thereof forming a second electrode;
wherein said moveable element is moveable in response to applied electric potentials between the second electrode and the first electrode, wherein the first and second terminals are selectively connectable depending on the position of said moveable element, and wherein said contact conductor, at least one of said terminals, or both, are configured to be compliant in response to a contact force produced between said contact conductor and at least one of said terminals when said switch is closed.
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Accused Products
Abstract
MEMS switches are formed with membranes or layers that are deformable upon the application of a voltage. The MEMS switches may comprise compliant terminals and/or contact conductors to produce contact swiping.
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Citations
29 Claims
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1. A microelectromechanical systems (MEMS) switch comprising:
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at least first and second terminals; a contact conductor that electrically connects at least a pair of said terminals when said switch is closed; a first electrode; and a moveable element having at least a portion thereof forming a second electrode; wherein said moveable element is moveable in response to applied electric potentials between the second electrode and the first electrode, wherein the first and second terminals are selectively connectable depending on the position of said moveable element, and wherein said contact conductor, at least one of said terminals, or both, are configured to be compliant in response to a contact force produced between said contact conductor and at least one of said terminals when said switch is closed. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A MEMS switch comprising:
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a deforming membrane; a contact conductor coupled to said deforming membrane and configured to move in response to deformation of said membrane, said contact conductor having at least one surface that is angled with respect to said contact conductor movement; at least one terminal having a surface that is angled to mate with said angled surface of said contact conductor in response to deformation of said membrane. - View Dependent Claims (11, 12, 13)
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14. A method of making a MEMS switch, said method comprising:
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forming at least one electrode layer on or over a substrate; forming at least one dielectric layer on or over said electrode layer; forming at least one sacrificial layer on or over said dielectric layer; forming at least one switch terminal on or over said at least one sacrificial layer; forming at least one additional sacrificial layer on or over said at least one switch terminal; forming a contact conductor on or over said at least one additional sacrificial layer; and removing said sacrificial layers. - View Dependent Claims (15, 16, 17, 18, 19)
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20. A MEMS switch comprising:
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a substrate; at least one switch terminal having at least a portion thereof suspended over said substrate; a deformable portion also suspended over said substrate, wherein at least a portion of said deformable portion comprises a contact conductor that contacts said at least one switch terminal when said deformable portion is deformed under the influence of a voltage. - View Dependent Claims (21)
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22. A method of simultaneously forming at least one MEMS display element and at least one MEMS switch, said method comprising:
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forming at least one electrode layer on or over a substrate; forming at least one dielectric layer on or over said substrate; forming at least one sacrificial layer on or over said dielectric layer; simultaneously forming a first switch component of a MEMS switch and a mirror component of a MEMS display element on or over said sacrificial layer; simultaneously forming at least one additional sacrificial layer on or over said first switch component and said mirror component simultaneously forming a second switch component of said MEMS switch and a deforming layer of said MEMS display element on or over the additional sacrificial layer; and removing said sacrificial layers. - View Dependent Claims (23, 24, 25)
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26. A MEMS switch comprising:
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means for selective actuation to open and close said switch; and means for contact swiping between at least one terminal and at least one contact conductor in said switch. - View Dependent Claims (27, 28, 29)
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Specification