MULTI-STEP DEP-ETCH-DEP HIGH DENSITY PLASMA CHEMICAL VAPOR DEPOSITION PROCESSES FOR DIELECTRIC GAPFILLS
First Claim
1. A method of forming a dielectric material in a substrate gap using a high-density plasma, the method comprising:
- depositing a first portion of the dielectric material into the gap with the high-density plasma;
exposing the first portion of dielectric material to an etchant comprising reactive species from a mixture that includes NH3 and NF3; and
depositing a final portion of the dielectric material in the gap with the high-density plasma.
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Accused Products
Abstract
A method of forming a dielectric material in a substrate gap using a high-density plasma is described. The method may include depositing a first portion of the dielectric material into the gap with the high-density plasma. The deposition may form a protruding structure that at least partially blocks the deposition of the dielectric material into the gap. The first portion of dielectric material is exposed to an etchant that includes reactive species from a mixture that includes NH3 and NF3. The etchant forms a solid reaction product with the protruding structure, and the solid reaction product may be removed from the substrate. A final portion of the dielectric material may be deposited in the gap with the high-density plasma.
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Citations
20 Claims
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1. A method of forming a dielectric material in a substrate gap using a high-density plasma, the method comprising:
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depositing a first portion of the dielectric material into the gap with the high-density plasma; exposing the first portion of dielectric material to an etchant comprising reactive species from a mixture that includes NH3 and NF3; and depositing a final portion of the dielectric material in the gap with the high-density plasma. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A method of forming a dielectric material in a substrate gap using a high-density plasma, the method comprising:
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depositing a first portion of the dielectric material into the gap with the high-density plasma, wherein the deposition forms a protruding structure that at least partially blocks the deposition of the dielectric material into the gap; exposing the first portion of dielectric material to an etchant comprising reactive species from a mixture that includes NH3 and NF3, wherein the etchant forms a solid reaction product with the protruding structure; removing the solid reaction product from the substrate; and depositing a final portion of the dielectric material in the gap with the high-density plasma. - View Dependent Claims (15, 16, 17, 18, 19)
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20. A method of forming a dielectric material on a substrate using a high-density plasma, the method comprising:
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depositing a first portion of the dielectric material into a gap on the substrate with the high-density plasma in a HDPCVD chamber, wherein the deposition forms a protruding structure that at least partially blocks the deposition of the dielectric material into the gap; transferring the substrate to an etching chamber and exposing the first portion of dielectric material to an etchant comprising reactive species from a mixture that includes NH3 and NF3, wherein the etchant forms a solid reaction product with the protruding structure; removing the solid reaction product from the substrate; and transferring the substrate back to the HDPCVD chamber and depositing a final portion of the dielectric material in the gap with the high-density plasma.
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Specification