MEMS scanner driven by two or more signal lines
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Abstract
A MEMS oscillator, such as a MEMS scanner, has an improved and simplified drive scheme and structure. Drive impulses may be transmitted to an oscillating mass via torque through the support arms. For multi-axis oscillators drive signals for two or more axes may be superimposed by a driver circuit and transmitted to the MEMS oscillator. The oscillator responds in each axis according to its resonance frequency in that axis. The oscillator may be driven resonantly in some or all axes. Improved load distribution results in reduced deformation. A simplified structure offers multi-axis oscillation using a single moving body. Another structure directly drives a plurality of moving bodies. Another structure eliminates actuators from one or more moving bodies, those bodies being driven by their support arms.
75 Citations
47 Claims
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1-39. -39. (canceled)
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40. A MEMS scanner, comprising:
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a frame; a scan plate coupled to the frame, the scan plate being able to rotate around at least two axes of rotation; one or more actuators coupled to the scan plate; and two or more drive signal lines coupled to the one or more actuators, the number of drive signal lines being less than twice the number of axes of rotation; whereby rotation of the scan plate around at least one of the axes of rotation is driven through a pair of drive signal lines that also carries a signal for driving the scan plate to rotate around at least a second axis of rotation. - View Dependent Claims (41, 42, 43, 44, 45, 46)
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47-58. -58. (canceled)
Specification