Driving a MEMS oscillator through a secondary set of support arms
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Abstract
A MEMS oscillator, such as a MEMS scanner, has an improved and simplified drive scheme and structure. Drive impulses may be transmitted to an oscillating mass via torque through the support arms. For multi-axis oscillators drive signals for two or more axes may be superimposed by a driver circuit and transmitted to the MEMS oscillator. The oscillator responds in each axis according to its resonance frequency in that axis. The oscillator may be driven resonantly in some or all axes. Improved load distribution results in reduced deformation. A simplified structure offers multi-axis oscillation using a single moving body. Another structure directly drives a plurality of moving bodies. Another structure eliminates actuators from one or more moving bodies, those bodies being driven by their support arms.
40 Citations
58 Claims
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1-25. -25. (canceled)
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26. A MEMS oscillator, comprising:
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a frame; a first set of support arms coupled to the frame; a gimbal coupled to the first set of support arms; an actuator positioned to drive the gimbal to rotate around an axis defined by the first set of support arms; a second set of support arms coupled to the gimbal; and an oscillating body coupled to the second set of support arms to receive a drive impulse through the second set of support arms from the gimbal so as to be driven to oscillate around an axis defined by the second set of support arms. - View Dependent Claims (27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39)
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40-46. -46. (canceled)
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47. A MEMS device, comprising:
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an inner plate having a principal oscillatory mode at a first frequency; an outer plate having a secondary oscillatory mode at the first frequency; and a coupling between the inner plate and the outer plate selected to couple the first frequency secondary oscillatory mode of the outer plate to the first frequency principal oscillatory mode of the inner plate. - View Dependent Claims (48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58)
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Specification