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Annulus clamping and backside gas cooled electrostatic chuck

  • US 20080144251A1
  • Filed: 12/19/2006
  • Published: 06/19/2008
  • Est. Priority Date: 12/19/2006
  • Status: Active Grant
First Claim
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1. An electrostatic clamp for clamping a workpiece, the electrostatic clamp comprising:

  • a clamping plate, comprising;

    an annulus comprising a first layer having a first surface associated therewith, wherein the first surface is configured to contact a peripheral region of a surface of the workpiece;

    a central disk comprising a second layer having a second surface, wherein the annulus generally encircles the central disk, and wherein the second surface is generally recessed from the first surface, therein generally defining a gap between the second surface and the surface of the workpiece; and

    one or more backside gas delivery apertures in fluid communication with a gas supply and positioned proximate to an interface between the annulus and the central disk;

    a first electrode associated with the annulus, wherein the first electrode is electrically connected to a first voltage potential; and

    a second electrode associated with the central disk, wherein the second electrode is electrically connected to a second voltage potential, and wherein the first electrode and second electrode are electrically isolated from one another..

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