MgO-Based Tunnel Spin Injectors

• US 20080145952A1
• Filed: 08/07/2007
• Published: 06/19/2008
• Est. Priority Date: 08/22/2003
• Status: Active Grant

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Parkin, Stuart Stephen Papworth
• Granted Patent: US 7,534,626 B2
• Time in Patent Office: Days
• US Class Current: 438/3
• CPC Class Codes: H01L 29/66984 Devices using spin polarized carriers
• CPC Class Codes: Y10S 977/933 Spintronics or quantum computing

Abstract

A MgO tunnel barrier is sandwiched between semiconductor material on one side and a ferri- and/or ferromagnetic material on the other side to form a spintronic element. The semiconductor material may include GaAs, for example. The spintronic element may be used as a spin injection device by injecting charge carriers from the magnetic material into the MgO tunnel barrier and then into the semiconductor. Similarly, the spintronic element may be used as a detector or analyzer of spin-polarized charge carriers by flowing charge carriers from the surface of the semiconducting layer through the MgO tunnel barrier and into the (ferri- or ferro-) magnetic material, which then acts as a detector. The MgO tunnel barrier is preferably formed by forming a Mg layer on an underlayer (e.g., a ferromagnetic layer), and then directing additional Mg, in the presence of oxygen, towards the underlayer.

Claims

1. A method, comprising:

forming a MgO tunnel barrier on a surface of an underlayer;

forming an overlayer on the MgO tunnel barrier to construct a spintronic element, with one of the underlayer and the overlayer including a layer of semiconductor material, and the other of the underlayer and the overlayer including a layer of magnetic material selected from the group consisting of ferromagnetic materials and ferrimagnetic materials, and

annealing the MgO tunnel barrier at a temperature selected to improve its tunneling characteristics, wherein

i) the MgO tunnel barrier is sandwiched between the underlayer and the overlayer, and

ii) the first layer, the MgO tunnel barrier, and the second layer are configured to enable spin-polarized charge carrier transport between the semiconductor material and the magnetic material,

said forming a MgO tunnel barrier including;

depositing Mg onto the surface of the underlayer to form a Mg layer thereon; and

directing additional Mg, in the presence of oxygen, towards the Mg layer to form a MgO tunnel barrier in contact with the underlayer, the oxygen reacting with the additional Mg and the Mg layer.

2. The method of claim 1, wherein the thickness of the Mg layer is selected to be large enough to prevent oxidation of the underlayer but small enough that, upon reaction of the oxygen with the Mg layer, substantially all the Mg in the Mg layer is converted into MgO.

3. The method of claim 1, wherein the Mg layer is deposited in the absence of substantial amounts of reactive oxygen.

4. The method of claim 1, wherein the MgO tunnel barrier has a thickness of between 3 and 50 angstroms.

5. The method of claim 1, wherein the MgO tunnel barrier and the semiconductor material are formed so that they are lattice-matched, and each of the MgO tunnel barrier and the semiconductor material is crystalline.

6. The method of claim 1, wherein the semiconductor material includes GaAs, the MgO tunnel barrier is substantially (100) oriented, and the magnetic material includes ferromagnetic material that is bcc and substantially (100) oriented.

7. The method of claim 1, wherein the semiconductor material includes Si.

8. The method of claim 1, wherein upon application of a voltage across the spintronic element, the spin polarization of charge carriers flowing between the MgO tunnel barrier and the semiconductor material is greater than 20%.

9. The method of claim 1, wherein upon application of a voltage across the spintronic element, the spin polarization of charge carriers flowing between the MgO tunnel barrier and the semiconductor material is greater than 40%.

10. The method of claim 1, wherein upon application of a voltage across the spintronic element, the spin polarization of charge carriers flowing between the MgO tunnel barrier and the semiconductor material is greater than 50%.

11. The method of claim 1, wherein the annealing temperature is at least 300°

C.

12. The method of claim 1, wherein the annealing step includes annealing the MgO tunnel barrier at a temperature of at least 300°

C. for 60 minutes.

13. The method of claim 1, wherein the magnetic material includes ferromagnetic material.

14. The method of claim 13, wherein the ferromagnetic material includes an alloy of Co and Fe.

15. The method of claim 1, further comprising:

forming a first lead that is in electrical communication with the semiconductor material; and

forming a second lead that is in electrical communication with the magnetic material, thereby enabling at least one of the following;

the flowing of spin-polarized charge carriers into the spintronic element, and the flowing of spin-polarized charge carriers out of the spintronic element.

16. The method of claim 1, further comprising:

forming a second spintronic element in electronic communication with the first spintronic element, the first and the second spintronic elements together forming respective devices for spin injection and spin detection.

17. The method of claim 1, wherein the semiconductor material is selected from the group consisting of Al_xGa_1-xAs, In_yGa_1-yAs, ZnSe, GaN, InGaN, GaNInAs, GaSb, InGaSb, InP, InGaP, Si, Ge, SiGe, and heterostructures thereof, in which x and y are between 0 and 100%.

18. The method of claim 1, comprising annealing the spintronic element to increase the spin polarization of charge carriers passed through the element.

19. The method of claim 1, wherein each of the MgO tunnel barrier and the semiconductor material is crystalline.

20. The method of claim 19, wherein upon application of a voltage across the spintronic element, the spin polarization of charge carriers flowing between the MgO tunnel barrier and the semiconductor material is greater than 20%.

21. The method of claim 20, wherein the semiconductor material includes GaAs.

22. The method of claim 20, wherein the semiconductor material includes Si.

23. The method of claim 20, wherein the MgO tunnel barrier is substantially (100) oriented, and the magnetic material includes ferromagnetic material that is bcc and substantially (100) oriented.

24. The method of claim 20, wherein the MgO tunnel barrier is in direct contact with both the semiconductor material and the magnetic material.

25. The method of claim 20, further comprising:

forming a first lead that is in electrical communication with the semiconductor material; and

forming a second lead that is in electrical communication with the magnetic material, thereby enabling at least one of the following;

the flowing of spin-polarized charge carriers into the spintronic element, and the flowing of spin-polarized charge carriers out of the spintronic element.