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STACK STRUCTURE AND METHOD OF MANUFACTURING THE SAME

  • US 20080145970A1
  • Filed: 02/14/2008
  • Published: 06/19/2008
  • Est. Priority Date: 03/23/2004
  • Status: Active Grant
First Claim
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1. A method of manufacturing a stack structure provided with a plurality of substrates including at least a first substrate, a second substrate including glass and a third substrate, comprising:

  • applying a first electric field acting in a direction between the first and second substrates to bond a first bonding film located between one of surfaces of the first substrate and one of surfaces of the second substrate to oxygen atoms in the glass in the second substrate, and also to effect anodic bonding of the first and second substrates to each other in such a manner as to incorporate alkali components in the glass in the second substrate into a buffer film provided on the other surface of the second substrate, andapplying a second electric field acting in the same direction as the first electric field, between the second substrate and the third substrate including glass to bond a second bonding film which is located between the other surface of the second substrate and one of the surfaces of the third substrate, to oxygen atoms in the glass of the second substrate, and also to effect anodic bonding of the second and third substrates in such a manner as to incorporate alkali components in the glass of the third substrate into a second buffer film provided on the other surface of the third substrate.

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