PRIMARY SERVER ARCHITECTURAL NETWORKING ARRANGEMENT AND METHODS THEREFOR

• US 20080147668A1
• Filed: 12/14/2006
• Published: 06/19/2008
• Est. Priority Date: 12/14/2006
• Status: Active Grant

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Huang, Chung-Ho, Weetman, Chad R.
• Granted Patent: US 7,882,076 B2
• Time in Patent Office: Days
• US Class Current: 707/10
• CPC Class Codes: G06F 16/10 File systems; File servers

Abstract

An arrangement for performing at least one of collecting and analyzing data from a tool cluster configured to process a set of substrates is provided. The arrangement includes a plurality of tools from which at least one tool of the plurality of tools has a chamber for processing at least one of the set of substrates. The arrangement also includes a plurality of secondary servers configured to collect sensor data from the plurality of tools. The arrangement further includes a primary server communicably coupled with the plurality of secondary servers and configured to execute a database management system. The sensor data is indexed using a plurality of indexing applications on the plurality of secondary servers prior to being forwarded to the primary server for use by the database management system. Indexing includes associating a sensor data item with an identity of a server where the sensor data item is stored.

Claims

1. An arrangement for performing at least one of collecting and analyzing data from a tool cluster configured to process a set of substrates, said arrangement comprising:

a plurality of tools, at least one tool of said plurality of tools having a chamber for processing at least one of said set of substrates;

a plurality of secondary servers configured to collect sensor data from said plurality of tools, each of said plurality of secondary servers being configured to execute a data indexing application; and

a primary server communicably coupled with said plurality of secondary servers, said primary server being configured to execute a database management system, wherein said sensor data is indexed using a plurality of indexing applications on said plurality of secondary servers prior to being forwarded to said primary server for use by said database management system, wherein indexing a sensor data item is configured to at least associate said sensor data item with an identity of a server where said sensor data item is stored.

2. The arrangement of claim 1 wherein said plurality of indexing applications including an overlord indexing application and a plurality of minion indexing applications, said primary server being configured to include said overlord indexing application and said plurality of secondary servers being configured to include said plurality of minion indexing applications, wherein said overlord indexing application is configured to define and manage a set of relationships between said plurality of tools and at least one of said primary server and said plurality of secondary servers, said overlord indexing application being configured to forward said plurality of relationships to said plurality of minion indexing applications.

3. The arrangement of claim 1 wherein said tool cluster is a plasma processing cluster tool.

4. The arrangement of claim 1 wherein said primary server including a unified access user interface, said unified access user interface being configured to receive a search criteria, wherein said primary server is configured to employ said search criteria in searching said database management system to identify a file path for a data file of a plurality of data files, said database management system being configured to stored a plurality of indexed data item about said plurality of data files.

5. The arrangement of claim 1 wherein said primary server including a web access user interface, said web access user interface being configured to receive a search criteria, wherein said primary server is configured to employ said search criteria in searching said database management system to identify a file path for a data file of a plurality of data files, said database management system being configured to stored a plurality of indexed data item about said plurality of data files.

6. The arrangement of claim 1 wherein said primary server is configured to collect said sensor data from said plurality of tools, said primary server being configured to execute an indexing application to index said sensor data.

7. The arrangement of claim 1 wherein said primary server is geographically remote from said plurality of secondary servers and said primary server is connected to said plurality of secondary servers using the internet.

8. A method for performing at least one of collecting and analyzing data from a tool cluster configured to process a set of substrates, said method comprising:

collecting sensor data from a plurality of tools, at least one tool of said plurality of tools having a chamber for processing at least one of said set of substrates;

sending said sensor data to a plurality of secondary servers;

indexing said sensor data by employing a plurality of indexing applications on said plurality of secondary servers to obtain indexed data, wherein indexing a sensor data item is configured to at least associate said sensor data item with an identity of a server where said sensor data item is stored; and

forwarding said indexed data to a primary server, said primary server is configured to be communicably coupled with said plurality of secondary servers, said primary server being configured to execute a database management system.

9. The method of claim 8 wherein said plurality of indexing applications including an overlord indexing application and a plurality of minion indexing applications, said primary server being configured to include said overlord indexing application and said plurality of secondary servers being configured to include said plurality of minion indexing application, wherein said overlord indexing application is configured to define and manage a set of relationships between said plurality of tools and at least one of said primary server and said plurality of secondary servers, said overlord indexing application being configured to forward said plurality of relationships to said plurality of minion indexing applications.

10. The method of claim 8 wherein said tool cluster is a plasma processing cluster tool.

11. The method of claim 8 wherein said primary server including a unified access user interface, said unified access user interface being configured to receive a search criteria, wherein said primary server is configured to employ said search criteria in searching said database management system to identify a file path for a data file of a plurality of data files, said database management system being configured to stored a plurality of indexed data item about said plurality of data files.

12. The method of claim 8 wherein said primary server including a web access user interface, said web access user interface being configured to receive a search criteria, wherein said primary server is configured to employ said search criteria in searching said database management system to identify a file path for a data file of a plurality of data files, said database management system being configured to stored a plurality of indexed data item about said plurality of data files.

13. The method of claim 8 wherein said primary server is configured to collect said sensor data from said plurality of tools, said primary server being configured to execute an indexing application to index said sensor data.

14. The method of claim 8 wherein said primary server is geographically remote from said plurality of secondary servers and said primary server is connected to said plurality of secondary servers using the internet.

15. A computer-implemented method for performing at least one of collecting and analyzing data from a tool cluster configured to process a set of substrates, said method comprising:

collecting sensor data from a plurality of tools, at least one tool of said plurality of tools having a chamber for processing at least one of said set of substrates;

sending said sensor data to a plurality of secondary servers;

storing said sensor data at said plurality of secondary servers;

indexing said sensor data by employing a plurality of indexing applications on said plurality of secondary servers, wherein indexing a sensor data item is configured to at least associate said sensor data item with an identity of a server where said sensor data item is stored; and

forwarding said indexing of said sensor data to a primary server, said primary server is configured to be communicably coupled with said plurality of secondary servers, said primary server being configured to execute a database management system.

16. The computer-implemented method of claim 15 wherein said plurality of indexing applications including an overlord indexing application and a plurality of minion indexing applications, said primary server being configured to include said overlord indexing application and said plurality of secondary servers being configured to include said plurality of minion indexing application, wherein said overlord indexing application is configured to define and manage a set of relationships between said plurality of tools and at least one of said primary server and said plurality of secondary servers, said overlord indexing application being configured to forward said plurality of relationships to said plurality of minion indexing applications.

17. The computer-implemented method of claim 15 wherein said tool cluster is a plasma processing cluster tool.

18. The computer-implemented method of claim 15 wherein said primary server including a unified access user interface, said unified access user interface being configured to receive a search criteria, wherein said primary server is configured to employ said search criteria in searching said database management system to identify a file path for a data file of a plurality of data files, said database management system being configured to stored a plurality of indexed data item about said plurality of data files.

19. The computer-implemented method of claim 15 wherein said primary server including a web access user interface, said web access user interface being configured to receive a search criteria, wherein said primary server is configured to employ said search criteria in searching said database management system to identify a file path for a data file of a plurality of data files, said database management system being configured to stored a plurality of indexed data item about said plurality of data files.

20. The computer-implemented method of claim 15 wherein said primary server is configured to collect said sensor data from said plurality of tools, said primary server being configured to execute an indexing application to index said sensor data.

21. The computer-implemented method of claim 15 wherein said primary server is geographically remote from said plurality of secondary servers and said primary server is connected to said plurality of secondary servers using the internet.