VIBRATORY GYROSCOPE WITH PARASITIC MODE DAMPING
First Claim
1. A method of operating a planar resonator, comprising the steps of:
- sensing an amplitude of a parasitic vibration mode of a planar resonator with one or more sense electrodes of a plurality of capacitive electrodes adjacent to the planar resonator disposed proximate to one or more anti-nodes of the parasitic vibration mode of the planar resonator;
generating a proportional voltage to the amplitude of the parasitic vibration mode; and
damping the parasitic mode by applying a drive voltage generated from the proportional voltage to at least one or more drive electrodes of the plurality of capacitive electrodes adjacent to the planar resonator disposed proximate to the one or more anti-nodes of the parasitic vibration mode of the planar resonator.
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Accused Products
Abstract
Operation of a planar resonator gyroscope with in-plane parasitic modes of vibration to obtain improved performance is disclosed. A planar resonator gyroscope, such as a disc resonator gyroscope, may be operated with embedded electrodes. The embedded electrodes may be disposed adjacent to the planar resonator and proximate to one or more anti-nodes of a parasitic vibration mode. A sensed amplitude of the parasitic mode is applied in differential signals used to operate the gyroscope. A feedback controller for damping the parasitic mode applies a drive voltage generated from the proportional voltage to one or more drive electrodes adjacent to the planar resonator disposed proximate to one or more anti-nodes of the parasitic vibration mode of the planar resonator. Parasitic in-plane modes may be thus damped in operating the gyroscope with active damping applied through an analog operational amplifier or digital feedback.
47 Citations
21 Claims
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1. A method of operating a planar resonator, comprising the steps of:
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sensing an amplitude of a parasitic vibration mode of a planar resonator with one or more sense electrodes of a plurality of capacitive electrodes adjacent to the planar resonator disposed proximate to one or more anti-nodes of the parasitic vibration mode of the planar resonator; generating a proportional voltage to the amplitude of the parasitic vibration mode; and damping the parasitic mode by applying a drive voltage generated from the proportional voltage to at least one or more drive electrodes of the plurality of capacitive electrodes adjacent to the planar resonator disposed proximate to the one or more anti-nodes of the parasitic vibration mode of the planar resonator. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A sensor, comprising:
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a planar resonator; a plurality of capacitive electrodes disposed adjacent to the planar resonator and proximate to one or more anti-nodes of the parasitic vibration mode of the planar resonator, the plurality of capacitive electrodes including one or more sense electrodes for sensing an amplitude of a parasitic vibration mode of the planar resonator; a sensing circuit for generating a proportional voltage to the amplitude of the parasitic vibration mode; and a feedback controller for damping the parasitic mode by applying a drive voltage generated from the proportional voltage to at least one or more drive electrodes of the plurality of capacitive electrodes adjacent to the planar resonator disposed proximate to the one or more anti-nodes of the parasitic vibration mode of the planar resonator. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. A gyroscope, comprising:
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a planar resonator means for sensing a rotation having at least one set of drive electrodes partitioned into an opposing drive pair on opposite sides of a central mounting point of a planar resonator and at least one set of sense electrodes partitioned into an opposing sense pair on opposite sides of the central mounting point of the planar resonator; and a control circuit means for determining a drive differential signal between the opposing drive pair of the drive electrodes, determining a sense differential signal between the opposing sense pair of the sense electrodes, and applying feedback control signals to the set of drive electrodes based on the drive differential signal and the sense differential signal.
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Specification