Sensor for Detection of Single Molecules

• US 20080149479A1
• Filed: 02/20/2006
• Published: 06/26/2008
• Est. Priority Date: 02/18/2005
• Status: Abandoned Application

• Current Assignee: Midorion AB (Layerlab AB)
• Original Assignee: Midorion AB (Layerlab AB)
• Inventors: Olofsson, Niklas, Olofsson, Linda, Hansson, Niklas, Lundgren, Anders, Nordberg, Patrik
• Application Number:
  US11/884,025
• Publication Number:
  US 20080149479A1
• Time in Patent Office: Days
• US Class Current: 204/403.14
• CPC Class Codes: B82Y 15/00 Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
• CPC Class Codes: B82Y 30/00 Nanotechnology for materials or surface science, e.g. nanocomposites
• CPC Class Codes: G01N 33/5438 Electrodes
• CPC Class Codes: H01L 29/7613 Single electron transistors; Coulomb blockade devices H01L29/7888 takes precedence

Abstract

A single electron transistor device for sensing at least one particle, includes at least two electrodes positioned with a gap formed between the electrodes and an activation object positioned in the gap with an insulating layer between the activation object and each electrode. The activation object which is able to transfer electrons is arranged with at least one binding structure bonded to it for receiving the at least one particle. The electrodes are formed with an inter distance of less than 50 nm and the electrodes are connectable directly or indirectly to a signal acquisition system. The sensing device is arranged to allow a tunnelling current proportional to the presence of the at least one particle in the binding structure, to flow through the activation object. A method, and system using a single electron transistor device fabricated with micro/nano fabrication methods are also disclosed.

Claims

1. An electronic sensing device for sensing at least one particle (13), comprising at least two electrodes (1, 2) positioned with a gap (12) formed between said electrodes (1, 2) and an activation object (4) positioned in said gap with an insulating layer between said activation object (4) and each electrode (1, 2);

said activation object being able to transfer electrons and arranged with at least one binding structure (11) bonded to said activation object (4) for receiving said at least one particle (13) characterized in that said electrodes are formed with an inter distance of less than 50 nm and said electrodes (1, 2) being connectable (7, 8, 9, 10) directly or indirectly to a signal acquisition system (203);

said sensing device is arranged to allow a tunnelling current related to the presence of said at least one particle (13) in said binding structure (11), to flow through said activation object (4).

2. The device according to claim 1, further comprising an insulating layer (5, 6) formed on at least part of at least one electrode (1, 2) on a surface of said electrode (1, 2) facing particles to be sensed.

3. The device according to claim 2, wherein said insulating layer (5, 6) is formed in part by angle evaporation on a double resist mask.

4. The device according to claim 3, wherein said insulating layer (5, 6) is made of SiO₂, titanium oxide, aluminium oxide, chromium oxide, iron oxide, beryllium oxide, ceramics, polystyrene or Teflon.

5. The device according to claim 1, further comprising a sticking layer (14) formed under at least part of each electrode (1, 2).

6. The device according to claim 1, wherein said sticking layer is made of at least one of chromium, titanium, NiCr, or aluminium oxide.

7. The device according to claim 1, wherein said activation object (4) is a nano sized particle made of a metal or a conducting compound.

8. The device according to claim 7, wherein said activation object (4) is made of at least one of gold, titanium, aluminium, copper, iron, silver, palladium, cobalt or cadmium selenide.

9. The device according to claim 1, wherein said activation object (4) is stabilized by a stabilizing agent.

10. The device according to claim 9, wherein said stabilizing agent is citrate.

11. The device according to claim 1, wherein said activation object (4) is stabilized and/or functionalized with a self-assembling monolayer (SAM).

12. The device according to claim 11 wherein the self-assembled monolayer, SAM. comprises one or more thiols.

13. The device according to claim 12, wherein the self-assembled monolayer, SAM comprises one or more alkanethiols.

14. The device according to claim 13, wherein the self-assembled monolayer, SAM is assembled from hydrophilic substituted alkanethiols or hydrophobic alkanethiols.

15. The device according to claim 9, wherein said stabilized activation object (4) has a diameter of less than 20 nm, more preferably a diameter of less than 18 nm, more preferably a diameter of less than 16 nm, more preferably a diameter of less than 14 nm, more preferably a diameter of less than 12 nm, more preferably a diameter of less than 10 nm, more preferably a diameter of less than 8 nm, more preferably a diameter of less than 6 nm, and most preferably a diameter of less than 4 nm.

16. The device according to claim 1, wherein said activation object (4) is functionalized by binding a binding structure (11).

17. The device according to claim 10, wherein the stabilized activation object in claim 10 has been functionalized by exchange mediated functionalisation.

18. The device according to claim 16, wherein binding structure (11) is a compound from the group comprising water solvable ionic or zwitterionic compounds.

19. The device according claim 16, wherein the binding structure (11) is a molecular structure having functional groups chosen from the group comprising thiol, sulphide, amine, carboxylate, cyanide, diphenylphosphine and/or pyridine functional groups.

20. The device according to claim 16, wherein the binding structure (11) is chosen from the group comprising ions, atoms, molecules, low-molecular compounds, nucleotides, DNA-fragments, DNA-sequences, amino acids, peptides, proteins, antibodies, enzymes, receptors, and/or molecular imprinted polymers.

21. The device according to claim 16, wherein the activation object (4) has been functionalized with Avidin.

22. The device according to claim 21, wherein the avidin functionalized activation object (4) is bound to a biotinylated protein or protein fragment.

23. The device according to claim 16, wherein the activation object (4) has been functionalized with cysteine.

24. The device according to claim 16, wherein the activation object (4) has been functionalized with cystine.

25. The device according to claim 1, wherein the surfaces of said electrodes (1, 2) have been functionalized.

26. The device according to claim 25, wherein said functionalized electrodes (1, 2) are covered with a self-assembled monolayer, SAM.

27. The device according to claim 26, wherein said self-assembled monolayer, SAM comprises one or more alkanethiols with 16 or less carbon atoms, preferably alkanethiols with 14 or less carbon atoms, preferably alkanethiols with 12 or less carbon atoms, preferably alkanethiols with 10 or less carbon atoms, preferably alkanethiols with 8 or less carbon atoms, preferably alkanethiols with 6 or less carbon atoms, preferably alkanethiols with 4 or less carbon atoms.

28. The device according to claim 27, wherein said alkanethiol is a substituted alkanethiol.

29. The device according to claim 27, wherein said alkanethiol is a carboxylate terminated alkanethiol.

30. The device according to claim 29, wherein said alkanethiol is mercap-tohexadecanoic acid

31. The device according to claim 29, wherein said alkanethiol is mercaptopropionic acid.

32. The device according to claim 16, wherein the activation object (4) is a functionalized activation object (4) immobilized to an electrode (1, 2) whose surface has been functionalized.

33. The device according to claim 32, wherein said functionalized activation object (4) is immobilized to a functionalized electrode by covalent immobilization.

34. The device according to claim 32, wherein said functionalized activation object (4) is immobilized to a functionalized electrode by carbodiimide coupling.

35. The device according to claim 32, wherein said functionalized activation object (4) is immobilized to a functionalized electrode by glutaraldehyde coupling.

36. The device according to claim 32 wherein said functionalized activation object (4) is covalently coupled to a binding structure (11).

37. The device according to claim 36, wherein said binding structure (11) is one of the group comprising nucleotides, DNA-fragments, DNA-sequences, amino acids, peptides, proteins, antibodies, enzymes, receptors, molecular imprinted polymers.

38. The device according to claim 36, wherein said binding structure (11) is covalently coupled to a through the reactive groups of amino acid chosen from the groups comprising lysine, the N-terminal of the peptide with primary amines, aspartate, glutamate, the C-terminal with carboxylate groups and/or cysteine

39. The device according to claim 36, wherein said binding structure (11) is covalently coupled by carbodiimide coupling.

40. The device according to claim 36, wherein said binding structure (11) is covalently coupled by glutaraldehyde coupling.

41. A method for producing a cystine functionalized activation object (4) characterized in that;

a) mixing equal volumes of citrate stabilized gold nanoparticles having a mean diameter of less than 20 nm and a saturated cystine solution;

b) incubating the mixture in room temperature for 8-12 hrs;

c) centrifuging the mixture forming a pellet; and

d) redissolving the pellet in water.

42. A cystine functionalized activation object (4) prepared by a) mixing equal volumes of citrate stabilized gold nanoparticles having a mean diameter of less than 20 nm and a saturated cystine solution;

b) incubating the mixture in room temperature for 8-12 hrs;

c) centrifuging the mixture forming a pellet; and

d) redissolving the pellet in water.

43. (canceled)

44. A system for measuring low quantities of molecules or particles comprising:

an electronic sensing device (201) for sensing particles (13), comprising at least two electrodes (1, 2) positioned with a gap (12) formed between said electrodes (1, 2) and an activation object (4) positioned in said gap with an insulating layer between said activation object (4) and each electrode (1, 2);

said activation object being able to transfer electrons and arranged with at least one binding structure (11) bonded to said activation object (4) for receiving at least one particle (13) characterized in that said electrodes are formed with an inter distance of less than 50 nm and said electrodes (1, 2) being connectable (7, 8, 9, 10) directly or indirectly to a signal acquisition system (203);

said sensing device is arranged to allow a tunnelling current related to the presence of particle or particles (13) in said binding structure (11), to flow through said activation object (4);

electronics for signal processing (203); and

—

a processing device (202) for control of measurement and signal acquisition for processing and analysis of measured signals.

45. The system according to claim 44, further comprising a holder (210) for holding the electronic sensing device (201) and arranged with a quick release lock.

46. The system according to claim 44, further comprising a delivery system (204) for providing particles to be measured to said electronic sensing device (201).

47. A method of fabricating a gap (806) between electrodes in an electronic sensing device (20) for sensing particles, comprising the steps of:

forming a first electrode (802) onto a surface (801);

forming an aluminium layer (805) on said first electrode (802);

oxidizing said aluminium layer (805);

forming a second electrode (804) at least partly over said first electrode

(802) and said oxidized aluminium layer (803);

removing a part of said second electrode located on said oxidized aluminium layer (803); and

removing said oxidized aluminium layer (803) and said aluminium layer (805) from said first electrode (802).

48. An electronic sensing device (900) for sensing particles, comprising at least two electrodes (901, 902) positioned with a gap formed between said electrodes (901, 902) and a tunnelling object (904) positioned at least partly in said gap with an insulating layer between said tunnelling object (904) and each electrode (901, 902);

said tunnelling object (904) being able to transfer electrons, said device (900) further comprising a gate (930) arranged to receive particles to be sensed, characterized in that said electrodes (901, 902) are formed with an inter distance of less than 50 nm and said electrodes (901, 902) being connectable (907, 908, 909, 910) directly or indirectly to a signal acquisition system (203);

said sensing device is arranged to allow a tunnelling current related to the presence of particle or particles on said gate (930), to flow through said tunnelling object (904).

49. Method of fabrication of nanogaps according to a process wherein a double resist layer is used, comprising the steps of:

patterning a top resist with electrons and developing;

developing the non-electron sensitive bottom resist layer under the top resist and forming a thin bridge of the top resist;

—

defining, during evaporation the distance between two evaporated electrodes, the width of the resist bridge;

forming, due to migration, grains between the electrodes; and

forming a nanogap since the grains extend the electrodes and the nanogap is formed between grains.

50. The method according to claim 49, wherein said grains are modified by a plasma.

51. A method of fabricating nanogaps comprising the steps of:

evaporating a first electrode (702) onto a surface (701);

—

forming an oxidized aluminium layer (703) on said first electrode (702);

forming a second electrode (704) on said surface (701) and partly on said oxidized aluminium layer (703); and

removing said oxidized aluminium layer (703) forming a gap between said first and second electrodes.