Sensor for Detection of Single Molecules
First Claim
1. An electronic sensing device for sensing at least one particle (13), comprising at least two electrodes (1, 2) positioned with a gap (12) formed between said electrodes (1, 2) and an activation object (4) positioned in said gap with an insulating layer between said activation object (4) and each electrode (1, 2);
- said activation object being able to transfer electrons and arranged with at least one binding structure (11) bonded to said activation object (4) for receiving said at least one particle (13) characterized in that said electrodes are formed with an inter distance of less than 50 nm and said electrodes (1, 2) being connectable (7, 8, 9, 10) directly or indirectly to a signal acquisition system (203);
said sensing device is arranged to allow a tunnelling current related to the presence of said at least one particle (13) in said binding structure (11), to flow through said activation object (4).
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Accused Products
Abstract
A single electron transistor device for sensing at least one particle, includes at least two electrodes positioned with a gap formed between the electrodes and an activation object positioned in the gap with an insulating layer between the activation object and each electrode. The activation object which is able to transfer electrons is arranged with at least one binding structure bonded to it for receiving the at least one particle. The electrodes are formed with an inter distance of less than 50 nm and the electrodes are connectable directly or indirectly to a signal acquisition system. The sensing device is arranged to allow a tunnelling current proportional to the presence of the at least one particle in the binding structure, to flow through the activation object. A method, and system using a single electron transistor device fabricated with micro/nano fabrication methods are also disclosed.
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Citations
51 Claims
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1. An electronic sensing device for sensing at least one particle (13), comprising at least two electrodes (1, 2) positioned with a gap (12) formed between said electrodes (1, 2) and an activation object (4) positioned in said gap with an insulating layer between said activation object (4) and each electrode (1, 2);
- said activation object being able to transfer electrons and arranged with at least one binding structure (11) bonded to said activation object (4) for receiving said at least one particle (13) characterized in that said electrodes are formed with an inter distance of less than 50 nm and said electrodes (1, 2) being connectable (7, 8, 9, 10) directly or indirectly to a signal acquisition system (203);
said sensing device is arranged to allow a tunnelling current related to the presence of said at least one particle (13) in said binding structure (11), to flow through said activation object (4). - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40)
- said activation object being able to transfer electrons and arranged with at least one binding structure (11) bonded to said activation object (4) for receiving said at least one particle (13) characterized in that said electrodes are formed with an inter distance of less than 50 nm and said electrodes (1, 2) being connectable (7, 8, 9, 10) directly or indirectly to a signal acquisition system (203);
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41. A method for producing a cystine functionalized activation object (4) characterized in that;
- a) mixing equal volumes of citrate stabilized gold nanoparticles having a mean diameter of less than 20 nm and a saturated cystine solution;
b) incubating the mixture in room temperature for 8-12 hrs;
c) centrifuging the mixture forming a pellet; and
d) redissolving the pellet in water.
- a) mixing equal volumes of citrate stabilized gold nanoparticles having a mean diameter of less than 20 nm and a saturated cystine solution;
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42. A cystine functionalized activation object (4) prepared by a) mixing equal volumes of citrate stabilized gold nanoparticles having a mean diameter of less than 20 nm and a saturated cystine solution;
- b) incubating the mixture in room temperature for 8-12 hrs;
c) centrifuging the mixture forming a pellet; and
d) redissolving the pellet in water.
- b) incubating the mixture in room temperature for 8-12 hrs;
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43. (canceled)
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44. A system for measuring low quantities of molecules or particles comprising:
- an electronic sensing device (201) for sensing particles (13), comprising at least two electrodes (1, 2) positioned with a gap (12) formed between said electrodes (1, 2) and an activation object (4) positioned in said gap with an insulating layer between said activation object (4) and each electrode (1, 2);
said activation object being able to transfer electrons and arranged with at least one binding structure (11) bonded to said activation object (4) for receiving at least one particle (13) characterized in that said electrodes are formed with an inter distance of less than 50 nm and said electrodes (1, 2) being connectable (7, 8, 9, 10) directly or indirectly to a signal acquisition system (203);
said sensing device is arranged to allow a tunnelling current related to the presence of particle or particles (13) in said binding structure (11), to flow through said activation object (4);
electronics for signal processing (203); and
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a processing device (202) for control of measurement and signal acquisition for processing and analysis of measured signals. - View Dependent Claims (45, 46)
- an electronic sensing device (201) for sensing particles (13), comprising at least two electrodes (1, 2) positioned with a gap (12) formed between said electrodes (1, 2) and an activation object (4) positioned in said gap with an insulating layer between said activation object (4) and each electrode (1, 2);
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47. A method of fabricating a gap (806) between electrodes in an electronic sensing device (20) for sensing particles, comprising the steps of:
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forming a first electrode (802) onto a surface (801); forming an aluminium layer (805) on said first electrode (802); oxidizing said aluminium layer (805); forming a second electrode (804) at least partly over said first electrode (802) and said oxidized aluminium layer (803);
removing a part of said second electrode located on said oxidized aluminium layer (803); and
removing said oxidized aluminium layer (803) and said aluminium layer (805) from said first electrode (802).
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48. An electronic sensing device (900) for sensing particles, comprising at least two electrodes (901, 902) positioned with a gap formed between said electrodes (901, 902) and a tunnelling object (904) positioned at least partly in said gap with an insulating layer between said tunnelling object (904) and each electrode (901, 902);
- said tunnelling object (904) being able to transfer electrons, said device (900) further comprising a gate (930) arranged to receive particles to be sensed, characterized in that said electrodes (901, 902) are formed with an inter distance of less than 50 nm and said electrodes (901, 902) being connectable (907, 908, 909, 910) directly or indirectly to a signal acquisition system (203);
said sensing device is arranged to allow a tunnelling current related to the presence of particle or particles on said gate (930), to flow through said tunnelling object (904).
- said tunnelling object (904) being able to transfer electrons, said device (900) further comprising a gate (930) arranged to receive particles to be sensed, characterized in that said electrodes (901, 902) are formed with an inter distance of less than 50 nm and said electrodes (901, 902) being connectable (907, 908, 909, 910) directly or indirectly to a signal acquisition system (203);
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49. Method of fabrication of nanogaps according to a process wherein a double resist layer is used, comprising the steps of:
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patterning a top resist with electrons and developing; developing the non-electron sensitive bottom resist layer under the top resist and forming a thin bridge of the top resist;
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defining, during evaporation the distance between two evaporated electrodes, the width of the resist bridge;forming, due to migration, grains between the electrodes; and forming a nanogap since the grains extend the electrodes and the nanogap is formed between grains. - View Dependent Claims (50)
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51. A method of fabricating nanogaps comprising the steps of:
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evaporating a first electrode (702) onto a surface (701);
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forming an oxidized aluminium layer (703) on said first electrode (702);forming a second electrode (704) on said surface (701) and partly on said oxidized aluminium layer (703); and removing said oxidized aluminium layer (703) forming a gap between said first and second electrodes.
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Specification