METHOD AND APPARATUS FOR MEASURING THE FORCE OF STICTION OF A MEMBRANE IN A MEMS DEVICE
First Claim
1. A method of testing an array of interferometric modulators, comprising:
- applying an electrical current to an electrode connected to an adhered movable reflective element of an array of interferometric modulators, the array comprising a plurality of interferometric modulators comprising one or more movable reflective elements, the movable reflective elements coupled to a substrate and contacting a surface in an actuated state, wherein at least one of the movable reflective elements is adhered to the surface in the actuated state;
applying a magnetic field to the array; and
detecting movement of the adhered movable reflective element.
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Accused Products
Abstract
Disclosed are methods and systems for testing MEMS devices (e.g., interferometric modulators) so as to induce a moveable element to move from a first position to a second position and to detect the movement. The methods include applying an electrical current to the movable element in the presence of a magnetic field, thereby producing a Lorentz force on the movable element. The force required to move the movable element from the first position to the second position can then be estimated based on the magnitudes and geometric relationships of the electrical current and the magnetic field, and the geometry of the movable element. In some embodiments, the first position may be a movable element adhered to another surface (e.g., a layer on a substrate) due to stiction forces. In these embodiments, the stiction forces can be estimated. In other embodiments, the first position may be a relaxed position, where the movable element is spaced a first distance from a substrate, and the second position may be a second distance from the substrate and/or contacting the substrate. In these embodiments, the springiness (e.g., a spring constant) of support structures supporting the movable element can be estimated.
24 Citations
39 Claims
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1. A method of testing an array of interferometric modulators, comprising:
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applying an electrical current to an electrode connected to an adhered movable reflective element of an array of interferometric modulators, the array comprising a plurality of interferometric modulators comprising one or more movable reflective elements, the movable reflective elements coupled to a substrate and contacting a surface in an actuated state, wherein at least one of the movable reflective elements is adhered to the surface in the actuated state; applying a magnetic field to the array; and detecting movement of the adhered movable reflective element. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A method of testing a microelectromechanical system (MEMS) device, comprising:
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applying an electrical current to a conductive movable element of the MEMS device; applying a magnetic field to the conductive movable element; and detecting movement of the conductive movable element. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22, 23, 24)
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25. A system for testing an array of interferometric modulators, comprising:
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a power source configured to apply an electrical current to an electrode connected to an adhered movable reflective element of an array of interferometric modulators, the array comprising a plurality of interferometric modulators comprising one or more movable reflective elements, the movable reflective elements coupled to a substrate and contacting a surface in an actuated state, wherein at least one of the movable reflective elements is adhered to the surface in the actuated state; a magnetic field generator configured to apply a magnetic field to the array; an optical detector configured to detect light reflected from the array and produce a signal corresponding to the detected light; and a computer configured to receive the signal from the optical detector and determine movement of the adhered movable reflective element. - View Dependent Claims (26, 27, 28, 29, 30, 31, 32)
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33. A system for testing a microelectromechanical system (MEMS) device, comprising:
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a power source configured to apply an electrical current to a conductive movable element of the MEMS device; a magnetic field generator configured to apply a magnetic field to the conductive movable element; and an optical system configured to detect movement of the movable element. - View Dependent Claims (34, 35)
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36. A system for testing a microelectromechanical system (MEMS) device, wherein the MEMS device comprises at least one conductive movable element, the method comprising:
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means for applying an electrical current to the conductive movable element; means for applying a magnetic field to the conductive movable element; and means for detecting a movement of the movable element. - View Dependent Claims (37, 38, 39)
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Specification