Bearing Device, Stage Device, and Exposure Apparatus

• US 20080151213A1
• Filed: 10/07/2005
• Published: 06/26/2008
• Est. Priority Date: 10/18/2004
• Status: Abandoned Application

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Arai, Dai
• Application Number:
  US11/665,465
• Publication Number:
  US 20080151213A1
• Time in Patent Office: Days
• US Class Current: 355/72
• CPC Class Codes: F16C 29/025 Hydrostatic or aerostatic this type of bearing for rotary parts F16C32/06
• CPC Class Codes: F16C 32/064 the liquid being supplied under pressure
• CPC Class Codes: G03F 7/70816 Bearings

Abstract

A sufficient moving stroke can be secured without connecting a tube, etc. for supply of air. A movable body (3) having a pad part (73) and a fixed body (2) are provided. The movable body (3) is movably supported by the fixed body (2) by supplying the medium to the pad part (73). A supply part (5) which is provided in the fixed body (2) and to which the medium is supplied; a connecting part (75) which connects the supply part (5) with the pad part (73); and an opening and closing unit (6) which opens and closes the connecting part (75) according to the position of the movable body (3) with respect to the fixed body (2), are provided.

Claims

1. A bearing device having a movable body having a pad part and a fixed body and supplying a medium to the pad part to movably support the movable body by the fixed body, the bearing device comprising:

a supply part which is provided in the fixed body and to which the medium is supplied,

a connecting part which connects the supply part with the pad part, and

an opening and closing unit which opens and closes the connecting part according to the position of the movable body with respect to the fixed body.

2. The bearing device according to claim 1, wherein

the connecting part has a plurality of communicating parts which are arranged along a moving path of the movable body in the fixed body to communicate with the supply part, and

the opening and closing unit has a valve element which is provided in each of the plurality of communicating parts and which, when the movable body faces a communicating part, opens the communicating part, and when the movable body does not face the communicating part, blocks the communicating part

3. The bearing device according to claim 2, wherein

the movable body has a medium reservoir which is provided in a position which faces the communicating part so as to be connected to the pad part, and

the valve element opens the communicating part by the pressure of the medium introduced into the medium reservoir.

4. The bearing device according to claim 3, wherein the medium reservoirs are provided on both sides of the fixed body.

5. The bearing device according to claim 3, wherein the valve element is provided with a connecting passage which makes the supply part and the medium reservoir into a connected state when the movable body faces the communicating part.

6. A stage device having a movable member, wherein the movable member is movably supported by the bearing device according to claim 1.

7. An exposure apparatus which exposes a substrate placed on a stage device with a pattern, wherein the stage device according to claim 6 is used.

8. A bearing device having a movable body having a pad part and a fixed body and supplying a medium to the pad part to movably support the movable body by the fixed body, the bearing device comprising:

a supply part which is provided in the fixed body and to which the medium can be supplied,

a plurality of valve units which can communicate the supply part and the movable body, and

a supply unit which causes at least one valve unit of the plurality of valve units to connect with the supply part and the movable body according to the position of the movable body with respect to the fixed body, to supply the medium to the pad part.

9. The bearing device according to claim 8, wherein the supply unit supplies the medium to the pad part, using the valve unit of the plurality of valve units which faces the movable body.

10. The bearing device according to claim 8, wherein

the movable body has a medium reservoir to which the medium from the supply part is to be supplied, and

the valve unit which supplies the medium to the pad part connects with the supply part and the movable body by the pressure of the medium in the medium reservoir.

11. The bearing device according to claim 10, wherein the pressure of the medium is greater than atmospheric pressure.

12. The bearing device according to claim 10, wherein the medium reservoir is provided in a position different from the pad part.

13. The bearing device according to claim 10, wherein the medium reservoirs are provided on both sides of the fixed body.

14. The bearing device according to claim 8, wherein the valve unit which supplies the medium to the pad part connects with the supply part and the movable body by a magnetic force.

15. The bearing device according to claim 8, wherein each of the plurality of valve units has an electromagnetic valve.

16. The bearing device according to claim 8, wherein each of the plurality of valve units has a bleed hole.