Micromechanical actuator

• US 20080151342A1
• Filed: 11/06/2007
• Published: 06/26/2008
• Est. Priority Date: 11/07/2006
• Status: Active Grant

• Current Assignee: Robert Bosch GmbH
• Original Assignee: Robert Bosch GmbH
• Inventors: Krueger, Veronique, Pirk, Tjalf, Rudhard, Joachim, Lammer, Marco
• Granted Patent: US 8,791,620 B2
• Time in Patent Office: Days
• US Class Current: 359/198
• CPC Class Codes: B81B 2201/042 Micromirrors, not used as optical switches
• CPC Class Codes: B81B 3/004 Angular deflection
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means

Abstract

A micromechanical actuator includes a shaft and at least a first driving mechanism. The shaft and the first driving mechanism are connected by a first joint.

Claims

1. A micromechanical actuator comprising:

a shaft;

at least one first driving mechanism; and

a first joint connecting the shaft and the first driving mechanism.

2. The micromechanical actuator according to claim 1, further comprising a first lever, the first lever being joined at its one end to the shaft, and the first lever being joined at its other end by the first joint to the first driving mechanism.

3. The micromechanical actuator according to claim 1, further comprising:

a second driving mechanism; and

a second joint connecting the shaft and the second driving mechanism.

4. The micromechanical actuator according to claim 3, further comprising:

an anchorage; and

a third joint connecting at least one of the first and second driving mechanisms to the anchorage.

5. The micromechanical actuator according to claim 4, further comprising:

a second lever, at least one of the first and second driving mechanisms being connected by the third joint to one end of the second lever; and

a fourth joint connecting the anchorage to the other end of the second lever.

6. The micromechanical actuator according to claim 3, wherein at least one of the first and second driving mechanisms is an electrostatic driving mechanism having at least a first electrode and a second electrode.

7. The micromechanical actuator according to claim 3, wherein at least one of the first and second joints permits a translatory mobility of at least one of the first and second driving mechanisms in relation to the shaft.

8. The micromechanical actuator according to claim 1, wherein the actuator is situated at a surface of a substrate, and further comprising an anchorage joined to the substrate.