SPATIAL LIGHT MODULATOR WITH INTEGRATED OPTICAL COMPENSATION STRUCTURE
First Claim
1. A spatial light modulator comprising:
- a substrate;
a plurality of light-modulating elements over the substrate, the light-modulating elements configured to interferometrically modulate light transmitted through the substrate;
a first optical compensation structure under the substrate; and
a second optical compensation structure different than the first optical compensation structure, the second optical compensation structure arranged between the substrate and the light-modulating elements.
3 Assignments
0 Petitions
Accused Products
Abstract
A spatial light modulator comprises an integrated optical compensation structure, e.g., an optical compensation structure arranged between a substrate and a plurality of individually addressable light-modulating elements, or an optical compensation structure located on the opposite side of the light-modulating elements from the substrate. The individually addressable light-modulating elements are configured to modulate light transmitted through or reflected from the transparent substrate. Methods for making such spatial light modulators involve fabricating an optical compensation structure over a substrate and fabricating a plurality of individually addressable light-modulating elements over the optical compensation structure. The optical compensation structure may be a passive optical compensation structure. The optical compensation structure may include one or more of a supplemental frontlighting source, a diffuser, a black mask, a diffractive optical element, a color filter, an anti-reflective layer, a structure that scatters light, a microlens array, and a holographic film.
-
Citations
20 Claims
-
1. A spatial light modulator comprising:
-
a substrate; a plurality of light-modulating elements over the substrate, the light-modulating elements configured to interferometrically modulate light transmitted through the substrate; a first optical compensation structure under the substrate; and a second optical compensation structure different than the first optical compensation structure, the second optical compensation structure arranged between the substrate and the light-modulating elements. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
-
Specification