ELECTROSTATIC CHUCK AND METHOD OF FORMING
First Claim
Patent Images
1. An electrostatic chuck comprising:
- a substrate;
a patterned conductive layer overlying the substrate, the patterned conductive layer defining electrode pathways separated by gaps;
a resistive layer overlying the patterned conductive layer; and
a low-k dielectric layer overlying the substrate and disposed in the gaps between the electrode pathways, wherein the low-k dielectric layer comprises a material having a different phase than the material of the substrate.
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Abstract
An electrostatic chuck is disclosed which includes a substrate, a patterned conductive layer overlying the substrate, such that the patterned conductive layer is defining electrode pathways separated by gaps. The electrostatic chuck also includes a resistive layer overlying the patterned conductive layer and a low-k dielectric layer overlying the substrate and disposed in the gaps between the electrode pathways. The low-k dielectric layer includes a material having a different phase than the material of the substrate.
33 Citations
79 Claims
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1. An electrostatic chuck comprising:
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a substrate; a patterned conductive layer overlying the substrate, the patterned conductive layer defining electrode pathways separated by gaps; a resistive layer overlying the patterned conductive layer; and a low-k dielectric layer overlying the substrate and disposed in the gaps between the electrode pathways, wherein the low-k dielectric layer comprises a material having a different phase than the material of the substrate. - View Dependent Claims (3, 11, 12, 13, 16, 18, 19, 24, 27, 29, 31, 41, 42, 43, 46, 48, 54, 56, 57)
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2. (canceled)
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4-10. -10. (canceled)
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14-15. -15. (canceled)
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17. (canceled)
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20-23. -23. (canceled)
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25-26. -26. (canceled)
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28. (canceled)
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30. (canceled)
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32-40. -40. (canceled)
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44-45. -45. (canceled)
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47. (canceled)
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49-50. -50. (canceled)
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51. The electrostatic chuck of claim 48, wherein the dielectric ratio between the low-k dielectric material and the high-k dielectric material is not less than about b 1.0:
- 1.5.
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51-53. -53. (canceled)
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55. (canceled)
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58-62. -62. (canceled)
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63. A method of forming an electrostatic chuck comprising:
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providing a substrate; forming a conductive layer comprising a conductive material overlying the substrate; forming a resistive layer comprising a resistive material overlying the conductive layer; patterning the conductive layer and the resistive layer to form electrode pathways, defined by electrode stacks including the conductive layer and the resistive layer, wherein the electrode stacks are separated by gaps; and forming a low-k dielectric layer within the gaps. - View Dependent Claims (75, 76)
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64-74. -74. (canceled)
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77. (canceled)
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78. A method of forming an electronic device comprising:
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providing an electrostatic chuck comprising (i) a substrate, (ii) a patterned conductive layer overlying the substrate, the patterned conductive layer defining electrode pathways separated by gaps, (iii) a resistive layer overlying the patterned conductive layer defining a work surface, and (iv) a low-k dielectric layer overlying the substrate and disposed in the gaps between the electrode pathways, wherein the low-k dielectric layer comprises a material having a different phase than the material of the substrate; providing a workpiece overlying the work surface; providing a voltage across the electrostatic chuck to maintain the workpiece in proximity to the work surface; and processing the workpiece to form an electronic device.
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79-87. -87. (canceled)
Specification