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SHIELD PLATES FOR REDUCED FIELD COUPLING IN NONVOLATILE MEMORY

  • US 20080157169A1
  • Filed: 12/28/2006
  • Published: 07/03/2008
  • Est. Priority Date: 12/28/2006
  • Status: Abandoned Application
First Claim
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1. A nonvolatile memory system, comprising:

  • a plurality of adjacent charge storage regions formed along a substrate in a first direction, said charge storage regions having lower surface levels and upper surface levels;

    a plurality of adjacent control gates formed above said plurality of charge storage regions in said first direction, said control gates having upper surface levels;

    insulating members along sides of said charge storage regions facing adjacent charge storage regions in said first direction and along sides of said control gates facing adjacent control gates in said first direction, said insulating members extending from at least a level between said lower and upper surface levels of said charge storage regions to said upper surface levels of said control gate; and

    conductive isolating members along sides of said insulating members facing said first direction, said isolating members insulated from said charge storage regions and said control gates by said insulating members.

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