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Stressed barrier plug slot contact structure for transistor performance enhancement

  • US 20080157208A1
  • Filed: 12/29/2006
  • Published: 07/03/2008
  • Est. Priority Date: 12/29/2006
  • Status: Active Grant
First Claim
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1. A semiconductor structure comprising:

  • a transistor including a gate stack and a contact region, the gate stack defining a channel region thereunder; and

    a slot contact in contact with a portion of the contact region;

    wherein the slot contact induces a stress on the channel region.

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