Planar Inductor And Method Of Manufacturing It
First Claim
1. A planar inductor, comprising a metal element on a substrate, said metal element being provided with at least one groove extending along and into said element from at least one surface of said element, wherein said at least one groove extends into the element in a direction substantially perpendicular to the surface of the substrate.
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Accused Products
Abstract
A planar inductor comprises a metal element (11-14) on a substrate (300, 310), said metal element being provided with at least one groove (20) extending along and into said element from at least one surface (2) of said element. Said groove or grooves (20) extend into the element in a direction substantially perpendicular to the surface of the substrate (300, 310), giving rise to a higher Q value and a lower serial resistance are also achieved. The inductor may comprise grooved (11, 13, 14) and non-grooved (12) layers.
The invention also relates to a method of manufacturing the inductor.
20 Citations
14 Claims
- 1. A planar inductor, comprising a metal element on a substrate, said metal element being provided with at least one groove extending along and into said element from at least one surface of said element, wherein said at least one groove extends into the element in a direction substantially perpendicular to the surface of the substrate.
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13. A method of manufacturing a planar inductor, comprising the steps of:
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applying a metal element onto a substrate; and providing said metal element with grooves;
whereinthe grooves are made to extend into the metal element in a direction substantially perpendicular to the surface of the substrate. - View Dependent Claims (14)
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Specification